UVTech Systems Inc.

Organization

Sudbury, MA, US

Organizations

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for processing substrate edges
- Patent number 8,658,937
- Issue date Feb 25, 2014
- UVTech Systems, Inc.
- Kenneth J. Harte
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Fiber-optic beam delivery system for wafer edge processing
- Patent number 8,415,587
- Issue date Apr 9, 2013
- UVTech Systems, Inc.
- Ronald P. Millman
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for processing substrate edges
- Patent number 8,410,394
- Issue date Apr 2, 2013
- UVTech Systems, Inc.
- Ronald P. Millman
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Orthogonal beam delivery system for wafer edge processing
- Patent number 8,183,500
- Issue date May 22, 2012
- UVTech Systems, Inc.
- Kenneth J. Harte
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for surface cleaning
- Patent number 7,514,015
- Issue date Apr 7, 2009
- UVTech Systems
- David J. Elliott
- B08 - CLEANING
Information Patent Grant
Scanning plasma reactor
- Patent number 7,270,724
- Issue date Sep 18, 2007
- UVTech Systems, Inc.
- David J. Elliott
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Photocatalytic reactor system for treating flue effluents
- Patent number 6,773,683
- Issue date Aug 10, 2004
- UVTech Systems, Inc.
- David J. Elliott
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Photoreactive surface cleaning
- Patent number 5,814,156
- Issue date Sep 29, 1998
- UVTech Systems Inc.
- David J. Elliott
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Photoreactive surface processing
- Patent number 5,669,979
- Issue date Sep 23, 1997
- UVTech Systems, Inc.
- David J. Elliott
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Laser doping
- Publication number 20110185971
- Publication date Aug 4, 2011
- UVTech Systems, Inc.
- David J. Elliott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING SUBSTRATE EDGES
- Publication number 20110168672
- Publication date Jul 14, 2011
- UVTech Systems, Inc.
- Kenneth J. Harte
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MODULAR APPARATUS FOR WAFER EDGE PROCESSING
- Publication number 20110147350
- Publication date Jun 23, 2011
- UVTech Systems Inc.
- Ronald P. Millman, JR.
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ORTHOGONAL BEAM DELIVERY SYSTEM FOR WAFER EDGE PROCESSING
- Publication number 20110147352
- Publication date Jun 23, 2011
- UVTech Systems Inc.
- Kenneth J. Harte
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
FIBER-OPTIC BEAM DELIVERY SYSTEM FOR WAFER EDGE PROCESSING
- Publication number 20110139759
- Publication date Jun 16, 2011
- UVTech Systems Inc.
- Ronald P. Millman, JR.
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Photoreactive Removal of Ion Implanted Resist
- Publication number 20110061679
- Publication date Mar 17, 2011
- UVTech Systems, Inc.
- David J. Elliott
- B08 - CLEANING
Information Patent Application
LASER OPTICAL SYSTEM
- Publication number 20090323739
- Publication date Dec 31, 2009
- UV TECH SYSTEMS
- David J. Elliott
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus for laser oxidation and reduction
- Publication number 20080299780
- Publication date Dec 4, 2008
- UV Tech Systems, Inc.
- David J. Elliott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for delivery of pulsed laser radiation
- Publication number 20070224768
- Publication date Sep 27, 2007
- UVTech Systems, Inc.
- Victoria M. Chaplick
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PORTABLE SYSTEM FOR SEMICONDUCTOR MANUFACTURING
- Publication number 20060231204
- Publication date Oct 19, 2006
- UVTech Systems, Inc.
- David J. Elliott
- B08 - CLEANING
Information Patent Application
Method for surface cleaning
- Publication number 20050279380
- Publication date Dec 22, 2005
- UVTech Systems, Inc.
- David J. Elliott
- B08 - CLEANING
Information Patent Application
System and methods for surface cleaning
- Publication number 20050279453
- Publication date Dec 22, 2005
- UVTech Systems, Inc.
- David J. Elliott
- B08 - CLEANING

Trademarklast 30 trademarks

Information Trademark
76338422 - LASER MOP
- Serial number 76338422
- Filing date Nov 15, 2001
- UVTech Systems, Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
75243418 - LASER BROOM
- Serial number 75243418
- Registration number 2210151
- Filing date Feb 18, 1997
- UVTech Systems Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments

UVTech Systems Inc.

Organization

Patents Grantslast 30 patents

Method and apparatus for processing substrate edges

Fiber-optic beam delivery system for wafer edge processing

Method and apparatus for processing substrate edges

Orthogonal beam delivery system for wafer edge processing

Method for surface cleaning

Scanning plasma reactor

Photocatalytic reactor system for treating flue effluents

Photoreactive surface cleaning

Photoreactive surface processing

Patents Applicationslast 30 patents

Laser doping

METHOD AND APPARATUS FOR PROCESSING SUBSTRATE EDGES

MODULAR APPARATUS FOR WAFER EDGE PROCESSING

ORTHOGONAL BEAM DELIVERY SYSTEM FOR WAFER EDGE PROCESSING

FIBER-OPTIC BEAM DELIVERY SYSTEM FOR WAFER EDGE PROCESSING

Photoreactive Removal of Ion Implanted Resist

LASER OPTICAL SYSTEM

Method and apparatus for laser oxidation and reduction

Method and apparatus for delivery of pulsed laser radiation

PORTABLE SYSTEM FOR SEMICONDUCTOR MANUFACTURING

Method for surface cleaning

System and methods for surface cleaning

Trademarklast 30 trademarks

76338422 - LASER MOP

75243418 - LASER BROOM