Varian Japan K.K.T

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for regulating pressure in two chambers
- Patent number 5,913,978
- Issue date Jun 22, 1999
- Tokyo Electron Ltd.
- Susumu Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...