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Veeco-CVC, Inc.
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Fremont, CA, US
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Patent Grant
Dual collimated deposition apparatus and method of use
Patent number
6,592,728
Issue date
Jul 15, 2003
Veeco-CVC, Inc.
Ajit Paranjpe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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