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VEECO METROLOGY INC
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TUCSON, AZ, US
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Patent Grant
Interferometric measurement of non-homogeneous multi-material surfaces
Patent number
8,213,021
Issue date
Jul 3, 2012
Veeco Metrology, Inc.
Dong Chen
G01 - MEASURING TESTING
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Patent Grant
Systems and methods for utilizing scanning probe shape characteriza...
Patent number
7,578,176
Issue date
Aug 25, 2009
Veeco Metrology, Inc.
Tianming Bao
G01 - MEASURING TESTING
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