Veeco/CVC, Inc.

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Inductively-coupled-plasma ionized physical-vapor deposition appara...
- Patent number 6,471,830
- Issue date Oct 29, 2002
- Veeco/CVC, Inc.
- Mehrdad M. Moslehi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

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