VERITY INSTRUMENTS, INC

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DALLAS, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
System, apparatus, and method for improved background correction an...
- Patent number 12,174,071
- Issue date Dec 24, 2024
- Verity Instruments, Inc.
- John Corless
- G01 - MEASURING TESTING
Information Patent Grant
System, apparatus, and method for spectral filtering
- Patent number 11,885,682
- Issue date Jan 30, 2024
- Verity Instruments, Inc.
- Chris D. Pylant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Signal conversion system for optical sensors
- Patent number 11,725,985
- Issue date Aug 15, 2023
- Verity Instruments, Inc.
- Larry Arlos Bullock
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Multimode configurable spectrometer
- Patent number 11,424,115
- Issue date Aug 23, 2022
- Verity Instruments, Inc.
- Larry Arlos Bullock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma source
- Patent number 10,923,324
- Issue date Feb 16, 2021
- Verity Instruments, Inc.
- Mark A. Meloni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for measurement of complex structures
- Patent number 10,861,755
- Issue date Dec 8, 2020
- Verity Instruments, Inc.
- Andrew Weeks Kueny
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Fiberoptically-coupled measurement system with reduced sensitivity...
- Patent number 10,794,763
- Issue date Oct 6, 2020
- Verity Instruments, Inc.
- Mark A. Meloni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adaptable-modular optical sensor based process control system, and...
- Patent number 10,763,144
- Issue date Sep 1, 2020
- Verity Instruments, Inc.
- Sean Lynes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma source
- Patent number 10,679,832
- Issue date Jun 9, 2020
- Verity Instruments, Inc.
- Mark A. Meloni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for calibration of optical signals in semiconduct...
- Patent number 10,365,212
- Issue date Jul 30, 2019
- Verity Instruments, Inc.
- Andrew Weeks Kueny
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam exciter for use in chemical analysis in processing sy...
- Patent number 9,997,325
- Issue date Jun 12, 2018
- Verity Instruments, Inc.
- Jimmy W. Hosch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for the detection of arc events during the pla...
- Patent number 9,842,726
- Issue date Dec 12, 2017
- Verity Instruments, Inc.
- Stephen Daniels
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High dynamic range measurement system for process monitoring
- Patent number 9,801,265
- Issue date Oct 24, 2017
- Verity Instruments, Inc.
- Larry Arlos Bullock
- G01 - MEASURING TESTING
Information Patent Grant
Referenced and stabilized optical measurement system
- Patent number 9,772,226
- Issue date Sep 26, 2017
- Verity Instruments, Inc.
- John Douglas Corless
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for enhancing dynamic range of charge coupled...
- Patent number 9,386,241
- Issue date Jul 5, 2016
- Verity Instruments, Inc.
- Andrew Weeks Kueny
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Workpiece characterization system
- Patent number 9,383,323
- Issue date Jul 5, 2016
- Verity Instruments, Inc.
- Mark Anthony Meloni
- G01 - MEASURING TESTING
Information Patent Grant
High dynamic range measurement system for process monitoring
- Patent number 9,310,250
- Issue date Apr 12, 2016
- Verity Instruments, Inc.
- Larry Arlos Bullock
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Calibration of a radiometric optical monitoring system used for fau...
- Patent number 8,125,633
- Issue date Feb 28, 2012
- Verity Instruments, Inc.
- Mike Whelan
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for reducing the effects of window clouding on...
- Patent number 7,630,859
- Issue date Dec 8, 2009
- Verity Instruments, Inc.
- Kenneth C. Harvey
- G01 - MEASURING TESTING
Information Patent Grant
Self referencing heterodyne reflectometer and method for implementing
- Patent number 7,589,843
- Issue date Sep 15, 2009
- Verity Instruments, Inc.
- Arun Ananth Aiyer
- G01 - MEASURING TESTING
Information Patent Grant
Self referencing heterodyne reflectometer and method for implementing
- Patent number 7,545,503
- Issue date Jun 9, 2009
- Verity Instruments, Inc.
- Arun Ananth Aiyer
- G01 - MEASURING TESTING
Information Patent Grant
Heterodyne reflectometer for film thickness monitoring and method f...
- Patent number 7,339,682
- Issue date Mar 4, 2008
- Verity Instruments, Inc.
- Arun Ananth Aiyer
- G01 - MEASURING TESTING
Information Patent Grant
Non-contact optical profilometer with orthogonal beams
- Patent number 7,084,979
- Issue date Aug 1, 2006
- Verity Instruments, Inc.
- Arun Ananth Aiyer
- G01 - MEASURING TESTING
Information Patent Grant
System and method for in-situ monitor and control of film thickness...
- Patent number 7,049,156
- Issue date May 23, 2006
- Verity Instruments, Inc.
- Andrew Weeks Kueny
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical closed-loop control system for a CMP apparatus and method o...
- Patent number 6,991,514
- Issue date Jan 31, 2006
- Verity Instruments, Inc.
- Mark A. Meloni
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for implementing an afterglow emission spectro...
- Patent number 6,975,393
- Issue date Dec 13, 2005
- Verity Instruments, Inc.
- Jacob Mettes
- G01 - MEASURING TESTING
Information Patent Grant
System and method for determining endpoint in etch processes using...
- Patent number 6,830,939
- Issue date Dec 14, 2004
- Verity Instruments, Inc.
- Kenneth C. Harvey
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for characterization of microelectronic feature quality
- Patent number 6,642,063
- Issue date Nov 4, 2003
- Lam Research Corporation
- Randall S. Mundt
- G01 - MEASURING TESTING
Information Patent Grant
Spectroscopic ellipsometer
- Patent number 6,052,188
- Issue date Apr 18, 2000
- Verity Instruments, Inc.
- David U. Fluckiger
- G01 - MEASURING TESTING
Information Patent Grant
Dual frequency power supply and transducer
- Patent number 5,816,476
- Issue date Oct 6, 1998
- Verity Instruments Inc.
- David Buice
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
VERY HIGH RESOLUTION SPECTROMETER FOR MONITORING OF SEMICONDUCTOR P...
- Publication number 20240019302
- Publication date Jan 18, 2024
- Verity Instruments, Inc.
- Andrew Weeks Kueny
- G01 - MEASURING TESTING
Information Patent Application
CONTROL FOR SEMICONDUCTOR PROCESSING SYSTEMS
- Publication number 20240021450
- Publication date Jan 18, 2024
- Verity Instruments, Inc.
- Chris Pylant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR FAULT DETECTION AND OPERATIONAL READINESS FOR...
- Publication number 20240019305
- Publication date Jan 18, 2024
- Verity Instruments, Inc.
- Andrew Weeks Kueny
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM, APPARATUS, AND METHOD FOR IMPROVED BACKGROUND CORRECTION AN...
- Publication number 20230366736
- Publication date Nov 16, 2023
- Verity Instruments, Inc.
- John Corless
- G01 - MEASURING TESTING
Information Patent Application
FIBEROPTICAL CABLE ASSEMBLIES AND INTERFACES FOR SPECTROMETERS
- Publication number 20230280560
- Publication date Sep 7, 2023
- Verity Instruments, Inc.
- Larry Bullock
- G02 - OPTICS
Information Patent Application
SYSTEM, APPARATUS, AND METHOD FOR SPECTRAL FILTERING
- Publication number 20230194342
- Publication date Jun 22, 2023
- Verity Instruments, Inc.
- Chris D. Pylant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIMODE CONFIGURABLE SPECTROMETER
- Publication number 20220406586
- Publication date Dec 22, 2022
- Verity Instruments, Inc.
- Larry Arlos Bullock
- G01 - MEASURING TESTING
Information Patent Application
FIBEROPTICALLY-COUPLED MEASUREMENT SYSTEM WITH REDUCED SENSITIVITY...
- Publication number 20200264044
- Publication date Aug 20, 2020
- Verity Instruments, Inc.
- Mark A. Meloni
- G01 - MEASURING TESTING
Information Patent Application
SIGNAL CONVERSION SYSTEM FOR OPTICAL SENSORS
- Publication number 20190339130
- Publication date Nov 7, 2019
- Verity Instruments, Inc.
- Larry Arlos Bullock
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
ADAPTABLE-MODULAR OPTICAL SENSOR BASED PROCESS CONTROL SYSTEM, AND...
- Publication number 20190273007
- Publication date Sep 5, 2019
- Verity Instruments, Inc.
- Sean Lynes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA SOURCE
- Publication number 20190157045
- Publication date May 23, 2019
- Verity Instruments, Inc.
- Mark A. Meloni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA SOURCE
- Publication number 20190013187
- Publication date Jan 10, 2019
- Verity Instruments, Inc.
- Mark A. Meloni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIMODE CONFIGURABLE SPECTROMETER
- Publication number 20180286650
- Publication date Oct 4, 2018
- Verity Instruments, Inc.
- Larry Arlos Bullock
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR MEASUREMENT OF COMPLEX STRUCTURES
- Publication number 20180226305
- Publication date Aug 9, 2018
- Verity Instruments, Inc.
- Andrew Weeks Kueny
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR CALIBRATION OF OPTICAL SIGNALS IN SEMICONDUCT...
- Publication number 20180136118
- Publication date May 17, 2018
- Verity Instruments, Inc.
- Andrew Weeks Kueny
- G01 - MEASURING TESTING
Information Patent Application
HIGH DYNAMIC RANGE MEASUREMENT SYSTEM FOR PROCESS MONITORING
- Publication number 20160316546
- Publication date Oct 27, 2016
- Verity Instruments, Inc.
- Larry Arlos Bullock
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR THE DETECTION OF ARC EVENTS DURING THE PLA...
- Publication number 20160268108
- Publication date Sep 15, 2016
- Verity Instruments, Inc.
- Stephen DANIELS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Monitoring Pulsed Plasma Processes
- Publication number 20160131587
- Publication date May 12, 2016
- Verity Instruments, Inc.
- Mark Anthony Meloni
- G01 - MEASURING TESTING
Information Patent Application
Calibration of a radiometric optical monitoring system used for fau...
- Publication number 20090103081
- Publication date Apr 23, 2009
- Verity Instruments, Inc.
- Mike Whelan
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for reducing the effects of window clouding on...
- Publication number 20080275658
- Publication date Nov 6, 2008
- Verity Instruments, Inc.
- Kenneth C. Harvey
- G01 - MEASURING TESTING
Information Patent Application
Multichannel array as window protection
- Publication number 20080233016
- Publication date Sep 25, 2008
- Verity Instruments, Inc.
- Kenneth C. Harvey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for monitoring film thickness using heterodyne reflectometry...
- Publication number 20060285120
- Publication date Dec 21, 2006
- Verity Instruments, Inc.
- Arun Ananth Aiyer
- G01 - MEASURING TESTING
Information Patent Application
Heterodyne reflectomer for film thickness monitoring and method for...
- Publication number 20060192973
- Publication date Aug 31, 2006
- Verity Instruments, Inc.
- Arun Ananth Aiyer
- G01 - MEASURING TESTING

VERITY INSTRUMENTS, INC

Organization

Patents Grantslast 30 patents

System, apparatus, and method for improved background correction an...

System, apparatus, and method for spectral filtering

Signal conversion system for optical sensors

Multimode configurable spectrometer

Microwave plasma source

System and method for measurement of complex structures

Fiberoptically-coupled measurement system with reduced sensitivity...

Adaptable-modular optical sensor based process control system, and...

Microwave plasma source

System and method for calibration of optical signals in semiconduct...

Electron beam exciter for use in chemical analysis in processing sy...

Method and apparatus for the detection of arc events during the pla...

High dynamic range measurement system for process monitoring

Referenced and stabilized optical measurement system

Apparatus and method for enhancing dynamic range of charge coupled...

Workpiece characterization system

High dynamic range measurement system for process monitoring

Calibration of a radiometric optical monitoring system used for fau...

Method and apparatus for reducing the effects of window clouding on...

Self referencing heterodyne reflectometer and method for implementing

Self referencing heterodyne reflectometer and method for implementing

Heterodyne reflectometer for film thickness monitoring and method f...

Non-contact optical profilometer with orthogonal beams

System and method for in-situ monitor and control of film thickness...

Optical closed-loop control system for a CMP apparatus and method o...

Method and apparatus for implementing an afterglow emission spectro...

System and method for determining endpoint in etch processes using...

Apparatus for characterization of microelectronic feature quality

Spectroscopic ellipsometer

Dual frequency power supply and transducer

Patents Applicationslast 30 patents

VERY HIGH RESOLUTION SPECTROMETER FOR MONITORING OF SEMICONDUCTOR P...

CONTROL FOR SEMICONDUCTOR PROCESSING SYSTEMS

SYSTEM AND METHOD FOR FAULT DETECTION AND OPERATIONAL READINESS FOR...

SYSTEM, APPARATUS, AND METHOD FOR IMPROVED BACKGROUND CORRECTION AN...

FIBEROPTICAL CABLE ASSEMBLIES AND INTERFACES FOR SPECTROMETERS

SYSTEM, APPARATUS, AND METHOD FOR SPECTRAL FILTERING

MULTIMODE CONFIGURABLE SPECTROMETER

FIBEROPTICALLY-COUPLED MEASUREMENT SYSTEM WITH REDUCED SENSITIVITY...

SIGNAL CONVERSION SYSTEM FOR OPTICAL SENSORS

ADAPTABLE-MODULAR OPTICAL SENSOR BASED PROCESS CONTROL SYSTEM, AND...

MICROWAVE PLASMA SOURCE

MICROWAVE PLASMA SOURCE

MULTIMODE CONFIGURABLE SPECTROMETER

SYSTEM AND METHOD FOR MEASUREMENT OF COMPLEX STRUCTURES

SYSTEM AND METHOD FOR CALIBRATION OF OPTICAL SIGNALS IN SEMICONDUCT...

HIGH DYNAMIC RANGE MEASUREMENT SYSTEM FOR PROCESS MONITORING

METHOD AND APPARATUS FOR THE DETECTION OF ARC EVENTS DURING THE PLA...

Method and Apparatus for Monitoring Pulsed Plasma Processes

Calibration of a radiometric optical monitoring system used for fau...

Method and apparatus for reducing the effects of window clouding on...

Multichannel array as window protection

Method for monitoring film thickness using heterodyne reflectometry...

Heterodyne reflectomer for film thickness monitoring and method for...

Trademarklast 30 trademarks