VISTEC ELECTRON BEAM GMBH

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07745 JENA, DE

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Patents Grantslast 30 patents

Information Patent Grant
Particle beam apparatus and method for operating a particle beam ap...
- Patent number 10,814,361
- Issue date Oct 27, 2020
- VISTEC ELECTRON BEAM GMBH
- Christian Borschel
- B08 - CLEANING
Information Patent Grant
Aerostatic bearing arrangement and associated electrostatic preload...
- Patent number 8,529,130
- Issue date Sep 10, 2013
- Vistec Electron Beam GmbH
- Gerhard Schubert
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Aerostatically guided table system for vacuum application
- Patent number 8,496,221
- Issue date Jul 30, 2013
- Vistec Electron Beam GmbH
- Gerhard Schubert
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Table guided by aerostatic bearing elements for vacuum application
- Patent number 8,267,582
- Issue date Sep 18, 2012
- Vistec Electron Beam GmbH
- Gerhard Schubert
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Arrangement for the illumination of a substrate with a plurality of...
- Patent number 8,148,702
- Issue date Apr 3, 2012
- Vistec Electron Beam GmbH
- Hans-Joachim Doering
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Device and method for producing resist profiled elements
- Patent number 7,880,152
- Issue date Feb 1, 2011
- Giesecke & Devrient GmbH
- Wittich Kaule
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multi-beam modulator for a particle beam and use of the multi-beam...
- Patent number 7,741,620
- Issue date Jun 22, 2010
- Vistec Electron Beam GmbH
- Hans-Joachim Doering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Illumination condenser for a particle optical projection system
- Patent number 7,601,969
- Issue date Oct 13, 2009
- Vistec Electron Beam GmbH
- Hans-Joachim Doering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Correction lens system for a particle beam projection device
- Patent number 7,560,713
- Issue date Jul 14, 2009
- Vistec Electron Beam GmbH
- Hans-Joachim Doering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for reducing the fogging effect
- Patent number 7,435,517
- Issue date Oct 14, 2008
- Vistec Electron Beam GmbH
- Peter Hudek
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PARTICLE BEAM APPARATUS AND METHOD FOR OPERATING A PARTICLE BEAM AP...
- Publication number 20160368031
- Publication date Dec 22, 2016
- VISTEC ELECTRON BEAM GMBH
- Christian BORSCHEL
- B08 - CLEANING
Information Patent Application
Arrangement for the Illumination of a Substrate with a Plurality of...
- Publication number 20100148087
- Publication date Jun 17, 2010
- VISTEC ELECTRON BEAM GMBH
- Hans-Joachim Doering
- B82 - NANO-TECHNOLOGY
Information Patent Application
Aerostatically Guided Table System for Vacuum Application
- Publication number 20100122603
- Publication date May 20, 2010
- VISTEC ELECTRON BEAM GMBH
- Gerhard Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
AEROSTATIC BEARING ARRANGEMENT AND ASSOCIATED ELECTROSTATIC PRELOAD...
- Publication number 20100061667
- Publication date Mar 11, 2010
- VISTEC ELECTRON BEAM GMBH
- Gerhard Schubert
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
TABLE GUIDED BY AEROSTATIC BEARING ELEMENTS FOR VACUUM APPLICATION
- Publication number 20090255447
- Publication date Oct 15, 2009
- VISTEC ELECTRON BEAM GMBH
- Gerhard Schubert
- B82 - NANO-TECHNOLOGY
Information Patent Application
Device And Method For Producing Resist Profiled Elements
- Publication number 20080197295
- Publication date Aug 21, 2008
- VISTEC ELECTRON BEAM GMBH
- Wittich Kaule
- G11 - INFORMATION STORAGE
Information Patent Application
Illumination Condenser for a Particle Optical Projection System
- Publication number 20080035853
- Publication date Feb 14, 2008
- Vistec Electron Beam GmbH
- Hans-Joachim Doering
- B82 - NANO-TECHNOLOGY

VISTEC ELECTRON BEAM GMBH

Organization

Patents Grantslast 30 patents

Particle beam apparatus and method for operating a particle beam ap...

Aerostatic bearing arrangement and associated electrostatic preload...

Aerostatically guided table system for vacuum application

Table guided by aerostatic bearing elements for vacuum application

Arrangement for the illumination of a substrate with a plurality of...

Device and method for producing resist profiled elements

Multi-beam modulator for a particle beam and use of the multi-beam...

Illumination condenser for a particle optical projection system

Correction lens system for a particle beam projection device

Method for reducing the fogging effect

Patents Applicationslast 30 patents

PARTICLE BEAM APPARATUS AND METHOD FOR OPERATING A PARTICLE BEAM AP...

Arrangement for the Illumination of a Substrate with a Plurality of...

Aerostatically Guided Table System for Vacuum Application

AEROSTATIC BEARING ARRANGEMENT AND ASSOCIATED ELECTROSTATIC PRELOAD...

TABLE GUIDED BY AEROSTATIC BEARING ELEMENTS FOR VACUUM APPLICATION

Device And Method For Producing Resist Profiled Elements

Illumination Condenser for a Particle Optical Projection System

Trademarklast 30 trademarks