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Weilburg, DE
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Patents Grants
last 30 patents
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Patent Grant
Advancing means for a multi-coordinate measurement table of a coord...
Patent number
8,056,434
Issue date
Nov 15, 2011
Vistec Semiconductor Systems, GmbH
Tillman Ehrenberg
G01 - MEASURING TESTING
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Patent Grant
Device and method for determining an optical property of a mask
Patent number
7,864,319
Issue date
Jan 4, 2011
Vistec Semiconductor System GmbH
Hans-Artur Boesser
G01 - MEASURING TESTING
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Patents Applications
last 30 patents
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Patent Application
Illumination means and inspection means having an illumination means
Publication number
20090086483
Publication date
Apr 2, 2009
Vistec Semiconductor System GmbH
Kurt Hahn
G01 - MEASURING TESTING