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Wacker-Chemitronic Gesellschaft fur Electronik-Grundstoffe mbH
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Burghausen, DE
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Patent Grant
Process and apparatus for etching semiconductor surfaces
Patent number
4,971,654
Issue date
Nov 20, 1990
Wacker-Chemitronic Gesellschaft fur Electronik-Grundstoffe mbH
Anton Schnegg
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Process for polishing indium phosphide surfaces
Patent number
4,428,795
Issue date
Jan 31, 1984
Wacker-Chemitronic Gesellschaft fur Electronik-Grundstoffe mbH
Franz Kohl
C30 - CRYSTAL GROWTH
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