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Wacker Siltronic Gesellschaft fur Halbeitermaterialien mbH
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Burghausen, DE
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Patent Grant
Process for the production of an epitaxially coated semiconductor w...
Patent number
5,897,705
Issue date
Apr 27, 1999
Wacker Siltronic Gesellschaft fur Halbeitermaterialien mbH
Wolfgang Siebert
C30 - CRYSTAL GROWTH
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