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WACKER SILTRONIC GESELLSCHAFT FUR HALBLEITERMATERIALEN AG
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BURGHAUSEN, DE
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Patent Application
Coated silicon wafer and process for its production
Publication number
20030041798
Publication date
Mar 6, 2003
WACKER SILTRONIC GESELLSCHAFT FUR HALBLEITERMATERIALEN AG
Guido Wenski
C30 - CRYSTAL GROWTH