WaferMasters, Inc.

Organization

San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
In situ, ex situ and inline process monitoring, optimization and fa...
- Patent number 7,816,152
- Issue date Oct 19, 2010
- WaferMaster, Inc
- Woo Sik Yoo
- G01 - MEASURING TESTING
Information Patent Grant
Focused laser beam processing
- Patent number 7,718,554
- Issue date May 18, 2010
- WaferMasters, Inc.
- Woo Sik Yoo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical emission spectroscopy process monitoring and material chara...
- Patent number 7,599,048
- Issue date Oct 6, 2009
- WaferMasters, Inc.
- Woo Sik Yoo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Spectroscopy system
- Patent number 7,564,547
- Issue date Jul 21, 2009
- WaferMasters, Inc.
- Woo Sik Yoo
- G01 - MEASURING TESTING
Information Patent Grant
Selective heating using flash anneal
- Patent number 7,507,667
- Issue date Mar 24, 2009
- WaferMasters, Inc.
- Woo Sik Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical sample characterization system
- Patent number 7,440,094
- Issue date Oct 21, 2008
- WaferMasters Incorporated
- Woo Sik Yoo
- G01 - MEASURING TESTING
Information Patent Grant
Spectroscopy system
- Patent number 7,397,561
- Issue date Jul 8, 2008
- WaferMasters, Incorporated
- Woo Sik Yoo
- G01 - MEASURING TESTING
Information Patent Grant
Raman and photoluminescence spectroscopy
- Patent number 7,362,426
- Issue date Apr 22, 2008
- WaferMasters, Inc.
- Woo Sik Yoo
- G01 - MEASURING TESTING
Information Patent Grant
Gas-assisted rapid thermal processing
- Patent number 7,358,200
- Issue date Apr 15, 2008
- WaferMasters, Inc.
- Woo Sik Yoo
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
High pressure treatment for improved grain growth and void reduction
- Patent number 7,344,979
- Issue date Mar 18, 2008
- WaferMasters, Inc.
- Woo Sik Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective heating using flash anneal
- Patent number 7,276,457
- Issue date Oct 2, 2007
- WaferMasters, Inc.
- Woo Sik Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light beam conditioner
- Patent number 7,262,918
- Issue date Aug 28, 2007
- WaferMasters Incorporated
- Woo Sik Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low temperature wafer backside cleaning
- Patent number 7,198,677
- Issue date Apr 3, 2007
- WaferMasters, Inc.
- Woo Sik Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stacked annealing system
- Patent number 7,194,199
- Issue date Mar 20, 2007
- WaferMasters, Inc.
- Woo Sik Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated ashing and implant annealing method using ozone
- Patent number 7,141,513
- Issue date Nov 28, 2006
- WaferMasters, Inc.
- Woo Sik Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-spectral uniform light source
- Patent number 7,063,583
- Issue date Jun 20, 2006
- WaferMasters, Inc.
- Woo Sik Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Forced convection assisted rapid thermal furnace
- Patent number 6,952,889
- Issue date Oct 11, 2005
- WaferMasters, Inc.
- Woo Sik Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power generation system
- Patent number 6,932,561
- Issue date Aug 23, 2005
- WaferMasters, Inc.
- Woo Sik Yoo
- F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information Patent Grant
Selective heating using flash anneal
- Patent number 6,911,376
- Issue date Jun 28, 2005
- WaferMasters
- Woo Sik Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated ashing and implant annealing method
- Patent number 6,897,162
- Issue date May 24, 2005
- WaferMasters, Inc.
- Woo Sik Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas-assisted rapid thermal processing
- Patent number 6,887,803
- Issue date May 3, 2005
- WaferMasters, Inc.
- Woo Sik Yoo
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Batch furnace
- Patent number 6,879,778
- Issue date Apr 12, 2005
- WaferMasters, Inc.
- Woo Sik Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Focused photon energy heating chamber
- Patent number 6,862,404
- Issue date Mar 1, 2005
- WaferMasters
- Woo Sik Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus
- Patent number 6,840,763
- Issue date Jan 11, 2005
- WaferMasters, Inc.
- Yoo Woo Sik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hot plate annealing
- Patent number 6,809,035
- Issue date Oct 26, 2004
- WaferMasters, Inc.
- Woo Sik Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Source gas delivery
- Patent number 6,790,475
- Issue date Sep 14, 2004
- WaferMasters Inc.
- Woo Sik Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for H2 Recycling in semiconductor processing system
- Patent number 6,737,361
- Issue date May 18, 2004
- WaferMaster, Inc
- Woo Sik Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer batch processing system and method
- Patent number 6,727,194
- Issue date Apr 27, 2004
- WaferMasters, Inc.
- Woo Sik Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Benchtop processing
- Patent number 6,709,470
- Issue date Mar 23, 2004
- WaferMasters, Inc.
- Woo Sik Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotary valve
- Patent number 6,698,718
- Issue date Mar 2, 2004
- WaferMasters, Inc.
- Woo Sik Yoo
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

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Patents Applicationslast 30 patents

Information Patent Application
In situ process monitoring and control
- Publication number 20070042510
- Publication date Feb 22, 2007
- WaferMasters, Incorporated
- Woo Sik Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSED PHOTON ENERGY HEATING CHAMBER
- Publication number 20050053369
- Publication date Mar 10, 2005
- WaferMasters, Inc.
- Woo Sik Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Batch furnace
- Publication number 20040022528
- Publication date Feb 5, 2004
- WaferMasters, Inc.
- Woo Sik Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Rotary valve
- Publication number 20030042457
- Publication date Mar 6, 2003
- WaferMasters, Inc.
- Woo Sik Yoo
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Wafer processing system
- Publication number 20020119634
- Publication date Aug 29, 2002
- WaferMasters Incorporated
- Hiromitsu Kuribayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer processing system
- Publication number 20020090836
- Publication date Jul 11, 2002
- WaferMasters, Inc.
- Yoo Woo Sik
- H01 - BASIC ELECTRIC ELEMENTS

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Trademarklast 30 trademarks

Information Trademark
76551992 - SOFTFLASH
- Serial number 76551992
- Filing date Oct 14, 2003
- WaferMasters, Inc.
- 7 - Machines and machine tools
Information Trademark
76467417 - FLASH ANNEAL
- Serial number 76467417
- Filing date Nov 15, 2002
- WaferMasters, Inc.
- 7 - Machines and machine tools

WaferMasters, Inc.

Organization

Patents Grantslast 30 patents

In situ, ex situ and inline process monitoring, optimization and fa...

Focused laser beam processing

Optical emission spectroscopy process monitoring and material chara...

Spectroscopy system

Selective heating using flash anneal

Optical sample characterization system

Spectroscopy system

Raman and photoluminescence spectroscopy

Gas-assisted rapid thermal processing

High pressure treatment for improved grain growth and void reduction

Selective heating using flash anneal

Light beam conditioner

Low temperature wafer backside cleaning

Stacked annealing system

Integrated ashing and implant annealing method using ozone

Multi-spectral uniform light source

Forced convection assisted rapid thermal furnace

Power generation system

Selective heating using flash anneal

Integrated ashing and implant annealing method

Gas-assisted rapid thermal processing

Batch furnace

Focused photon energy heating chamber

Wafer processing apparatus

Hot plate annealing

Source gas delivery

Method for H2 Recycling in semiconductor processing system

Wafer batch processing system and method

Benchtop processing

Rotary valve

Patents Applicationslast 30 patents

In situ process monitoring and control

FOCUSED PHOTON ENERGY HEATING CHAMBER

Batch furnace

Rotary valve

Wafer processing system

Wafer processing system

Trademarklast 30 trademarks

76551992 - SOFTFLASH

76467417 - FLASH ANNEAL