Wireless MEMS, Inc.

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Oak Park, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Microelectromechanical device having a common ground plane layer an...
- Patent number 7,545,234
- Issue date Jun 9, 2009
- Wireless MEMS, Inc.
- Chia-Shing Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Balanced MEMS switch for next generation communication systems
- Patent number 7,466,215
- Issue date Dec 16, 2008
- Wireless MEMS, Inc.
- Chia-Shing Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Head electrode region for a reliable metal-to-metal contact micro-r...
- Patent number 7,352,266
- Issue date Apr 1, 2008
- Wireless MEMS, Inc.
- Chia-Shing Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planarized structure for a reliable metal-to-metal contact micro-re...
- Patent number 7,230,513
- Issue date Jun 12, 2007
- Wireless MEMS, Inc.
- Chia-Shing Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating semiconductor devices employing at least one...
- Patent number 7,101,724
- Issue date Sep 5, 2006
- Wireless MEMS, Inc.
- Chia-Shing Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication method for making a planar cantilever, low surface leak...
- Patent number 6,962,832
- Issue date Nov 8, 2005
- Wireless MEMS, Inc.
- Chia-Shing Chou
- H01 - BASIC ELECTRIC ELEMENTS