Yasuhiro Horiike

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Hiroshima, JP

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Patents Grantslast 30 patents

Information Patent Grant
Sputtering method and a sputtering apparatus thereof
- Patent number 6,096,176
- Issue date Aug 1, 2000
- Tokyo Electron Limited
- Yasuhiro Horiike
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming dielectric film for semiconductor devices
- Patent number 5,290,609
- Issue date Mar 1, 1994
- Tokyo Electron Limited
- Yasuhiro Horiike
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...