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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
3D microscope including insertable components to provide multiple i...
Patent number
10,048,480
Issue date
Aug 14, 2018
Zeta Instruments, Inc.
James Jianguo Xu
G02 - OPTICS
Information
Patent Grant
Method of detecting defect location using multi-surface specular re...
Patent number
9,921,169
Issue date
Mar 20, 2018
Zeta Instruments, Inc.
Steven W. Meeks
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus to optically detect defects in transparent solids
Patent number
9,784,691
Issue date
Oct 10, 2017
Zeta Instruments, Inc.
Steven W. Meeks
G01 - MEASURING TESTING
Information
Patent Grant
Multi-surface optical 3D microscope
Patent number
9,664,888
Issue date
May 30, 2017
Zeta Instruments, Inc.
Ken Kinsun Lee
G02 - OPTICS
Information
Patent Grant
Multi-surface optical 3D microscope
Patent number
9,645,381
Issue date
May 9, 2017
Zeta Instruments, Inc.
Ken Kinsun Lee
G02 - OPTICS
Information
Patent Grant
3D microscope and methods of measuring patterned substrates
Patent number
9,389,408
Issue date
Jul 12, 2016
Zeta Instruments, Inc.
Zhen Hou
G01 - MEASURING TESTING
Information
Patent Grant
Multi-surface optical 3D microscope
Patent number
9,036,869
Issue date
May 19, 2015
Zeta Instruments, Inc.
Ken Kinsun Lee
G02 - OPTICS
Information
Patent Grant
System and method for monitoring LED chip surface roughening process
Patent number
8,976,366
Issue date
Mar 10, 2015
Zeta Instruments, Inc.
James Jianguo Xu
G01 - MEASURING TESTING
Information
Patent Grant
Optical inspector
Patent number
8,896,825
Issue date
Nov 25, 2014
Zeta Instruments, Inc.
Steven W. Meeks
G01 - MEASURING TESTING
Information
Patent Grant
Multi-surface scattered radiation differentiation
Patent number
8,848,181
Issue date
Sep 30, 2014
Zeta Instruments, Inc.
Steven W. Meeks
G01 - MEASURING TESTING
Information
Patent Grant
Optical inspector with selective scattered radiation blocker
Patent number
8,836,935
Issue date
Sep 16, 2014
Zeta Instruments, Inc.
Steven W. Meeks
G01 - MEASURING TESTING
Information
Patent Grant
Optical inspector
Patent number
8,830,456
Issue date
Sep 9, 2014
Zeta Instruments, Inc.
Steven W. Meeks
G01 - MEASURING TESTING
Information
Patent Grant
Multi-surface optical inspector
Patent number
8,830,457
Issue date
Sep 9, 2014
Zeta Instruments, Inc.
Steven W. Meeks
G01 - MEASURING TESTING
Information
Patent Grant
Illuminator for a 3-D optical microscope
Patent number
8,184,364
Issue date
May 22, 2012
Zeta Instruments, Inc.
James Jianguo Xu
G02 - OPTICS
Information
Patent Grant
3-D optical microscope
Patent number
8,174,762
Issue date
May 8, 2012
Zeta Instruments, Inc.
James Jianguo Xu
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
3-D optical microscope
Patent number
7,944,609
Issue date
May 17, 2011
Zeta Instruments, Inc.
James Jianguo Xu
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
3-d optical microscope
Patent number
7,729,049
Issue date
Jun 1, 2010
Zeta Instruments, Inc.
James Jianguo Xu
H04 - ELECTRIC COMMUNICATION TECHNIQUE
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Patents Applications
last 30 patents
Information
Patent Application
AUTOMATED 3-D MEASUREMENT
Publication number
20180045937
Publication date
Feb 15, 2018
Zeta Instruments, Inc.
James Jianguo Xu
G02 - OPTICS
Information
Patent Application
OPTICAL MEASUREMENT OF STEP SIZE AND PLATED METAL THICKNESS
Publication number
20180045946
Publication date
Feb 15, 2018
Zeta Instruments, Inc.
James Jianguo Xu
G02 - OPTICS
Information
Patent Application
OPTICAL MEASUREMENT OF BUMP HIEGHT
Publication number
20180045947
Publication date
Feb 15, 2018
Zeta Instruments, Inc.
Ronny Soetarman
G02 - OPTICS
Information
Patent Application
OPTICAL MEASUREMENT OF OPENING DIMENSIONS IN A WAFER
Publication number
20180047148
Publication date
Feb 15, 2018
Zeta Instruments, Inc.
James Jianguo Xu
G02 - OPTICS
Information
Patent Application
DUAL MODE INSPECTOR
Publication number
20180005364
Publication date
Jan 4, 2018
Zeta Instruments, Inc.
Steven W. Meeks
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD OF DETECTING DEFECT LOCATION USING MULTI-SURFACE SPECULAR RE...
Publication number
20170336330
Publication date
Nov 23, 2017
Zeta Instruments, Inc.
Steven W. Meeks
G01 - MEASURING TESTING
Information
Patent Application
MULTI-SURFACE SPECULAR REFLECTION INSPECTOR
Publication number
20170336331
Publication date
Nov 23, 2017
Zeta Instruments, Inc.
Steven W. Meeks
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND APPARATUS TO DETECT DEFECTS IN TRANSPARENT SOLIDS
Publication number
20170261440
Publication date
Sep 14, 2017
Zeta Instruments, Inc.
Steven W. Meeks
G01 - MEASURING TESTING
Information
Patent Application
3D Microscope And Methods Of Measuring Patterned Substrates
Publication number
20160253813
Publication date
Sep 1, 2016
Zeta Instruments, Inc.
Zhen Hou
G02 - OPTICS
Information
Patent Application
3D Microscope And Methods Of Measuring Patterned Substrates
Publication number
20160252714
Publication date
Sep 1, 2016
Zeta Instruments, Inc.
Zhen Hou
G02 - OPTICS
Information
Patent Application
METHOD AND APPARATUS TO DETECT DEFECTS IN TRANSPARENT SOLIDS
Publication number
20160033421
Publication date
Feb 4, 2016
Zeta Instruments, Inc.
Steven W. Meeks
G01 - MEASURING TESTING
Information
Patent Application
Multi-Surface Optical 3D Microscope
Publication number
20150226952
Publication date
Aug 13, 2015
Zeta Instruments, Inc.
Ken Kinsun Lee
G02 - OPTICS
Information
Patent Application
Multi-Surface Optical 3D Microscope
Publication number
20150226953
Publication date
Aug 13, 2015
Zeta Instruments, Inc.
Ken Kinsun Lee
G02 - OPTICS
Information
Patent Application
MULTI-SURFACE SCATTERED RADIATION DIFFERENTIATION
Publication number
20140307255
Publication date
Oct 16, 2014
Zeta Instruments, Inc.
Steven W. Meeks
G01 - MEASURING TESTING
Information
Patent Application
Optical Inspector
Publication number
20140218722
Publication date
Aug 7, 2014
Zeta Instruments, Inc.
Steven W. Meeks
G02 - OPTICS
Information
Patent Application
Optical Inspector
Publication number
20140218724
Publication date
Aug 7, 2014
Zeta Instruments, Inc.
Steven W. Meeks
G01 - MEASURING TESTING
Information
Patent Application
System And Method For Monitoring LED Chip Surface Roughening Process
Publication number
20120327414
Publication date
Dec 27, 2012
Zeta Instruments, Inc.
James Jianguo Xu
G02 - OPTICS
Information
Patent Application
3D Microscope Including Insertable Components To Provide Multiple I...
Publication number
20120176475
Publication date
Jul 12, 2012
Zeta Instruments, Inc.
James Jianguo Xu
G02 - OPTICS
Information
Patent Application
Multi-Surface Optical 3D Microscope
Publication number
20120051660
Publication date
Mar 1, 2012
Zeta Instruments, Inc.
Ken Kinsun Lee
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
3D Microscope And Methods Of Measuring Patterned Substrates
Publication number
20120019626
Publication date
Jan 26, 2012
Zeta Instruments, Inc.
Zhen Hou
G06 - COMPUTING CALCULATING COUNTING