Zhongke Jingyuan Electron Limited, Beijing (CN)

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Beijing, CN

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Patents Grantslast 30 patents

Information Patent Grant
Overlay alignment mark and method for measuring overlay error
- Patent number 11,934,109
- Issue date Mar 19, 2024
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Weimin Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wien filter and charged particle beam imaging apparatus
- Patent number 11,756,761
- Issue date Sep 12, 2023
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam detection apparatus for semiconductor device and elec...
- Patent number 11,703,467
- Issue date Jul 18, 2023
- ZHONGKE JINGYUAN ELECTRON LIMITED, BEIJING
- Lei Jiang
- G01 - MEASURING TESTING
Information Patent Grant
Multi-pole deflector for charged particle beam and charged particle...
- Patent number 11,295,928
- Issue date Apr 5, 2022
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wien filter and charged particle beam imaging apparatus
- Patent number 11,239,044
- Issue date Feb 1, 2022
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjusting mechanism for adjusting deformation of panel and electron...
- Patent number 11,195,688
- Issue date Dec 7, 2021
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Lei Jiang
- H01 - BASIC ELECTRIC ELEMENTS

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Patents Applicationslast 30 patents

Information Patent Application
WAFER LOCKING MECHANISM, WAFER POSITIONING DEVICE AND WAFER CONVEYI...
- Publication number 20230223293
- Publication date Jul 13, 2023
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Lei JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER DEVICE, WAFER HANDLING APPARATUS AND METHOD FOR PROCESSING...
- Publication number 20230129809
- Publication date Apr 27, 2023
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Lei JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD-BEARING DEVICE, WAFER TRANSFER DEVICE, CHAMBER DEVICE AND WAFE...
- Publication number 20230075313
- Publication date Mar 9, 2023
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Lei JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM INSPECTION AP...
- Publication number 20230005709
- Publication date Jan 5, 2023
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM INSPECTION AP...
- Publication number 20230005704
- Publication date Jan 5, 2023
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM DETECTION APPARATUS FOR SEMICONDUCTOR DEVICE AND ELEC...
- Publication number 20220317071
- Publication date Oct 6, 2022
- ZHONGKE JINGYUAN ELECTRON LIMITED, BEIJING
- Lei JIANG
- G01 - MEASURING TESTING
Information Patent Application
WIEN FILTER AND CHARGED PARTICLE BEAM IMAGING APPARATUS
- Publication number 20220157556
- Publication date May 19, 2022
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Qinglang MENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Overlay Alignment Mark and Method for Measuring Overlay Error
- Publication number 20210382402
- Publication date Dec 9, 2021
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Weimin MA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OVERLAY ALIGNMENT MARK, METHOD FOR MEASURING OVERLAY ERROR, AND MET...
- Publication number 20210382401
- Publication date Dec 9, 2021
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Chengcheng LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTING MECHANISM FOR ADJUSTING DEFORMATION OF PANEL AND ELECTRON...
- Publication number 20210159045
- Publication date May 27, 2021
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Lei JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WIEN FILTER AND CHARGED PARTICLE BEAM IMAGING APPARATUS
- Publication number 20210066022
- Publication date Mar 4, 2021
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Qinglang MENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-POLE DEFLECTOR FOR CHARGED PARTICLE BEAM AND CHARGED PARTICLE...
- Publication number 20210066021
- Publication date Mar 4, 2021
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Qinglang MENG
- H01 - BASIC ELECTRIC ELEMENTS

Zhongke Jingyuan Electron Limited, Beijing (CN)

Organization

Patents Grantslast 30 patents

Overlay alignment mark and method for measuring overlay error

Wien filter and charged particle beam imaging apparatus

Electron beam detection apparatus for semiconductor device and elec...

Multi-pole deflector for charged particle beam and charged particle...

Wien filter and charged particle beam imaging apparatus

Adjusting mechanism for adjusting deformation of panel and electron...

Patents Applicationslast 30 patents

WAFER LOCKING MECHANISM, WAFER POSITIONING DEVICE AND WAFER CONVEYI...

CHAMBER DEVICE, WAFER HANDLING APPARATUS AND METHOD FOR PROCESSING...

LOAD-BEARING DEVICE, WAFER TRANSFER DEVICE, CHAMBER DEVICE AND WAFE...

SCANNING ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM INSPECTION AP...

SCANNING ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM INSPECTION AP...

ELECTRON BEAM DETECTION APPARATUS FOR SEMICONDUCTOR DEVICE AND ELEC...

WIEN FILTER AND CHARGED PARTICLE BEAM IMAGING APPARATUS

Overlay Alignment Mark and Method for Measuring Overlay Error

OVERLAY ALIGNMENT MARK, METHOD FOR MEASURING OVERLAY ERROR, AND MET...

ADJUSTING MECHANISM FOR ADJUSTING DEFORMATION OF PANEL AND ELECTRON...

WIEN FILTER AND CHARGED PARTICLE BEAM IMAGING APPARATUS

MULTI-POLE DEFLECTOR FOR CHARGED PARTICLE BEAM AND CHARGED PARTICLE...