A. Grey Lerner

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Portland, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Silicon etching control method and system
- Patent number 8,666,530
- Issue date Mar 4, 2014
- Electro Scientific Industries, Inc.
- Daragh Seosamh Finn
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CLOSED-LOOP SILICON ETCHING CONTROL METHOD AND SYSTEM
- Publication number 20120158169
- Publication date Jun 21, 2012
- Electro Scientific Industries, Inc.
- Daragh S. Finn
- H01 - BASIC ELECTRIC ELEMENTS