Aaron DURBIN

Person

Portland, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Dynamic temperature control of substrate support in substrate proce...
- Patent number 11,908,715
- Issue date Feb 20, 2024
- Lam Research Corporation
- Sairam Sundaram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High density hole pattern dual plenum hole showerhead assembly
- Patent number D948658
- Issue date Apr 12, 2022
- Lam Research Corporation
- Aaron Blake Miller
- D23 - Environmental heating and cooling
Information Patent Grant
Use of voltage and current measurements to control dual zone cerami...
- Patent number 11,028,482
- Issue date Jun 8, 2021
- Lam Research Corporation
- Aaron Durbin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Use of voltage and current measurements to control dual zone cerami...
- Patent number 10,633,742
- Issue date Apr 28, 2020
- LAM RESEARCH FOUNDATION
- Aaron Durbin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
APPARATUSES AND SYSTEMS FOR AMMONIA/CHLORINE CHEMISTRY SEMICONDUCTO...
- Publication number 20240412953
- Publication date Dec 12, 2024
- LAM RESEARCH CORPORATION
- Bradley Taylor Streng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE PLASMA DEPOSITION WITH ELECTROSTATIC CLAMPING
- Publication number 20240387226
- Publication date Nov 21, 2024
- LAM RESEARCH CORPORATION
- Aaron Blake MILLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES FOR THERMAL MANAGEMENT OF A PEDESTAL AND CHAMBER
- Publication number 20240234200
- Publication date Jul 11, 2024
- LAM RESEARCH CORPORATION
- Aaron Blake Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL ZONE HEATERS FOR METALLIC PEDESTALS
- Publication number 20240194506
- Publication date Jun 13, 2024
- LAM RESEARCH CORPORATION
- Sairam SUNDARAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRECURSOR DISPENSING SYSTEMS WITH LINE CHARGE VOLUME CONTAINERS FOR...
- Publication number 20240003008
- Publication date Jan 4, 2024
- LAM RESEARCH CORPORATION
- Saangrut SANGPLUG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE PLASMA ARCHITECTURE FOR TRUE RADICAL PROCESSING
- Publication number 20230332291
- Publication date Oct 19, 2023
- LAM RESEARCH CORPORATION
- Bhadri VARADARAJAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTOELECTRON ASSISTED PLASMA IGNITION
- Publication number 20230207274
- Publication date Jun 29, 2023
- LAM RESEARCH CORPORATION
- Lee CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DYNAMIC TEMPERATURE CONTROL OF SUBSTRATE SUPPORT IN SUBSTRATE PROCE...
- Publication number 20210272828
- Publication date Sep 2, 2021
- LAM RESEARCH CORPORATION
- Sairam SUNDARAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF VOLTAGE AND CURRENT MEASUREMENTS TO CONTROL DUAL ZONE CERAMI...
- Publication number 20200255945
- Publication date Aug 13, 2020
- LAM RESEARCH CORPORATION
- Aaron DURBIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
USE OF VOLTAGE AND CURRENT MEASUREMENTS TO CONTROL DUAL ZONE CERAMI...
- Publication number 20190338422
- Publication date Nov 7, 2019
- LAM RESEARCH CORPORATION
- Aaron DURBIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Aaron DURBIN

Person

Patents Grantslast 30 patents

Dynamic temperature control of substrate support in substrate proce...

High density hole pattern dual plenum hole showerhead assembly

Use of voltage and current measurements to control dual zone cerami...

Use of voltage and current measurements to control dual zone cerami...

Patents Applicationslast 30 patents

APPARATUSES AND SYSTEMS FOR AMMONIA/CHLORINE CHEMISTRY SEMICONDUCTO...

REMOTE PLASMA DEPOSITION WITH ELECTROSTATIC CLAMPING

APPARATUSES FOR THERMAL MANAGEMENT OF A PEDESTAL AND CHAMBER

DUAL ZONE HEATERS FOR METALLIC PEDESTALS

PRECURSOR DISPENSING SYSTEMS WITH LINE CHARGE VOLUME CONTAINERS FOR...

REMOTE PLASMA ARCHITECTURE FOR TRUE RADICAL PROCESSING

PHOTOELECTRON ASSISTED PLASMA IGNITION

DYNAMIC TEMPERATURE CONTROL OF SUBSTRATE SUPPORT IN SUBSTRATE PROCE...

USE OF VOLTAGE AND CURRENT MEASUREMENTS TO CONTROL DUAL ZONE CERAMI...

USE OF VOLTAGE AND CURRENT MEASUREMENTS TO CONTROL DUAL ZONE CERAMI...