Aaron Song

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Hsinchu, TW

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Patents Grantslast 30 patents

Information Patent Grant
SiOCH low k surface protection layer formation by CxHy gas plasma t...
- Patent number 6,962,869
- Issue date Nov 8, 2005
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tien-I Bao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming a hydrophilic surface on low-k dielectric insula...
- Patent number 6,677,251
- Issue date Jan 13, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsin-Hsien Lu
- H01 - BASIC ELECTRIC ELEMENTS