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Kawasaki, JP
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Patents Grants
last 30 patents
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Patent Grant
Negative resist composition, method of forming resist pattern and p...
Patent number
8,771,921
Issue date
Jul 8, 2014
Tokyo Ohka Kogyo Co., Ltd.
Abe Sho
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Patents Applications
last 30 patents
Information
Patent Application
NEGATIVE RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN AND P...
Publication number
20120164581
Publication date
Jun 28, 2012
Abe Sho
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Negative resist composition for immersion exposure and method of fo...
Publication number
20090274976
Publication date
Nov 5, 2009
Abe Sho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY