Abhay Bhushan

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ultra-low particle semiconductor cleaner
- Patent number 6,491,043
- Issue date Dec 10, 2002
- SCD Mountain View, Inc.
- Raj Mohindra
- G11 - INFORMATION STORAGE
Information Patent Grant
Ultra-low particle semiconductor cleaner
- Patent number 6,352,082
- Issue date Mar 5, 2002
- SCD Mountain View
- Raj Mohindra
- B08 - CLEANING
Information Patent Grant
Apparatus for delivering ultra-low particle counts in semiconductor...
- Patent number 6,312,597
- Issue date Nov 6, 2001
- SCD Mountain View, Inc.
- Raj Mohindra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra-low particle semiconductor cleaner
- Patent number 6,158,446
- Issue date Dec 12, 2000
- FSI International
- Raj Mohindra
- B08 - CLEANING
Information Patent Grant
Ultra-low particle semiconductor cleaner using heated fluids
- Patent number 5,958,146
- Issue date Sep 28, 1999
- YieldUP International
- Raj Mohindra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning and drying photoresist coated wafers
- Patent number 5,932,027
- Issue date Aug 3, 1999
- YieldUP International
- Raj Mohindra
- B08 - CLEANING
Information Patent Grant
Ultra-low particle semiconductor cleaner
- Patent number 5,891,256
- Issue date Apr 6, 1999
- YieldUP International
- Raj Mohindra
- B08 - CLEANING
Information Patent Grant
Ultra-low particle semiconductor cleaner
- Patent number 5,878,760
- Issue date Mar 9, 1999
- YieldUP International
- Raj Mohindra
- B08 - CLEANING
Information Patent Grant
Ultra-low particle disk cleaner
- Patent number 5,873,947
- Issue date Feb 23, 1999
- YieldUP International
- Raj Mohindra
- B08 - CLEANING
Information Patent Grant
Ultra-low particle semiconductor cleaner
- Patent number 5,868,150
- Issue date Feb 9, 1999
- YieldUP International
- Raj Mohindra
- B08 - CLEANING
Information Patent Grant
Ultra-low particle semiconductor cleaner
- Patent number 5,772,784
- Issue date Jun 30, 1998
- YieldUP International
- Raj Mohindra
- B08 - CLEANING
Information Patent Grant
Ultra-low particle semiconductor apparatus
- Patent number 5,685,327
- Issue date Nov 11, 1997
- YieldUP International
- Raj Mohindra
- B08 - CLEANING
Information Patent Grant
Method and apparatus for delivering ultra-low particle counts in se...
- Patent number 5,651,379
- Issue date Jul 29, 1997
- YieldUP International
- Raj Mohindra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra-low particle semiconductor method
- Patent number 5,634,978
- Issue date Jun 3, 1997
- YieldUP International
- Raj Mohindra
- B08 - CLEANING
Information Patent Grant
Method for cleaning and drying a semiconductor wafer
- Patent number 5,571,337
- Issue date Nov 5, 1996
- YieldUP International
- Raj Mohindra
- B08 - CLEANING
Information Patent Grant
Apparatus for delivering ultra-low particle counts in semiconductor...
- Patent number 5,542,441
- Issue date Aug 6, 1996
- YieldUP International
- Raj Mohindra
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Ultra-low particle semiconductor cleaner
- Publication number 20020043272
- Publication date Apr 18, 2002
- SCD Mountain View, Inc.
- Raj Mohindra
- H01 - BASIC ELECTRIC ELEMENTS

Abhay Bhushan

Person

Patents Grantslast 30 patents

Ultra-low particle semiconductor cleaner

Ultra-low particle semiconductor cleaner

Apparatus for delivering ultra-low particle counts in semiconductor...

Ultra-low particle semiconductor cleaner

Ultra-low particle semiconductor cleaner using heated fluids

Cleaning and drying photoresist coated wafers

Ultra-low particle semiconductor cleaner

Ultra-low particle semiconductor cleaner

Ultra-low particle disk cleaner

Ultra-low particle semiconductor cleaner

Ultra-low particle semiconductor cleaner

Ultra-low particle semiconductor apparatus

Method and apparatus for delivering ultra-low particle counts in se...

Ultra-low particle semiconductor method

Method for cleaning and drying a semiconductor wafer

Apparatus for delivering ultra-low particle counts in semiconductor...

Patents Applicationslast 30 patents

Ultra-low particle semiconductor cleaner