Abhiram Govindaraju

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San Diego, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Target material control in an EUV light source
- Patent number 11,963,285
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Abhiram Lakshmi Ganesh Govindaraju
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Droplet generator steering system
- Patent number 10,426,020
- Issue date Sep 24, 2019
- ASML Netherlands B.V.
- Peter M. Baumgart
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Droplet generator steering system
- Patent number 9,279,445
- Issue date Mar 8, 2016
- ASML Netherlands B.V.
- Peter M. Baumgart
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
EUV light source glint reduction system
- Patent number 8,368,039
- Issue date Feb 5, 2013
- Cymer, Inc.
- Abhiram Govindaraju
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
TARGET MATERIAL CONTROL IN AN EUV LIGHT SOURCE
- Publication number 20220159817
- Publication date May 19, 2022
- ASML NETHERLANDS B.V.
- Abhiram Lakshmi Ganesh Govindaraju
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DROPLET GENERATOR STEERING SYSTEM
- Publication number 20160150626
- Publication date May 26, 2016
- ASML NETHERLANDS B.V.
- Peter M. BAUMGART
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET GENERATOR STEERING SYSTEM
- Publication number 20130153792
- Publication date Jun 20, 2013
- Cymer, Inc.
- Peter M. Baumgart
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Extreme Ultraviolet Light Source
- Publication number 20110240890
- Publication date Oct 6, 2011
- CYMER INC.
- Abhiram Govindaraju
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR