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Abraham Arceo de la Pena
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Albany, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Selective shrink for contact trench
Patent number
11,935,931
Issue date
Mar 19, 2024
International Business Machines Corporation
Ruilong Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Organic photoresist adhesion to metal oxide hardmasks
Patent number
11,543,751
Issue date
Jan 3, 2023
International Business Machines Corporation
Abraham Arceo de la Pena
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Creating different width lines and spaces in a metal layer
Patent number
11,373,880
Issue date
Jun 28, 2022
International Business Machines Corporation
Christopher J Penny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hard mask films with graded vertical concentration formed using rea...
Patent number
10,975,464
Issue date
Apr 13, 2021
International Business Machines Corporation
Ekmini Anuja De Silva
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Patterning directly on an amorphous silicon hardmask
Patent number
10,950,440
Issue date
Mar 16, 2021
International Business Machines Corporation
Abraham Arceo de la Pena
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Patterning directly on an amorphous silicon hardmask
Patent number
10,755,926
Issue date
Aug 25, 2020
International Business Machines Corporation
Abraham Arceo de la Pena
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry and wet etch resistance for atomic layer deposited TiO2 for SIT...
Patent number
10,366,879
Issue date
Jul 30, 2019
International Business Machines Corporation
Cornelius Brown Peethala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tunable TiOxNy hardmask for multilayer patterning
Patent number
10,249,512
Issue date
Apr 2, 2019
International Business Machines Corporation
Abraham Arceo De La Pena
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tunable TiOxNy hardmask for multilayer patterning
Patent number
9,941,142
Issue date
Apr 10, 2018
International Business Machines Corporation
Abraham Arceo De La Pena
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Application of titanium-oxide as a patterning hardmask
Patent number
9,799,534
Issue date
Oct 24, 2017
International Business Machines Corporation
Abraham Arceo de la Pena
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CREATING DIFFERENT WIDTH LINES AND SPACES IN A METAL LAYER
Publication number
20220093414
Publication date
Mar 24, 2022
International Business Machines Corporation
Christopher J Penny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Selective Shrink for Contact Trench
Publication number
20210384306
Publication date
Dec 9, 2021
International Business Machines Corporation
Ruilong Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ORGANIC PHOTORESIST ADHESION TO METAL OXIDE HARDMASKS
Publication number
20210325784
Publication date
Oct 21, 2021
International Business Machines Corporation
Abraham Arceo de la Pena
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERNING DIRECTLY ON AN AMORPHOUS SILICON HARDMASK
Publication number
20200090928
Publication date
Mar 19, 2020
International Business Machines Corporation
Abraham Arceo de la Pena
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HARD MASK FILMS WITH GRADED VERTICAL CONCENTRATION FORMED USING REA...
Publication number
20190309410
Publication date
Oct 10, 2019
International Business Machines Corporation
Ekmini Anuja De Silva
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PATTERNING DIRECTLY ON AN AMORPHOUS SILICON HARDMASK
Publication number
20190157072
Publication date
May 23, 2019
International Business Machines Corporation
Abraham Arceo de la Pena
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRY AND WET ETCH RESISTANCE FOR ATOMIC LAYER DEPOSITED TIO2 FOR SIT...
Publication number
20190148140
Publication date
May 16, 2019
International Business Machines Corporation
Cornelius Brown Peethala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TUNABLE TiOxNy HARDMASK FOR MULTILAYER PATTERNING
Publication number
20180197752
Publication date
Jul 12, 2018
International Business Machines Corporation
ABRAHAM ARCEO DE LA PENA
H01 - BASIC ELECTRIC ELEMENTS