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Abraham Veefkind
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Noordwijk, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus and contamination detection method
Patent number
8,547,551
Issue date
Oct 1, 2013
ASML Netherlands B.V.
Anastasius Jacobus Anicetus Bruinsma
G01 - MEASURING TESTING
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Patent Grant
Lithographic apparatus having a debris-mitigation system, a source...
Patent number
7,251,012
Issue date
Jul 31, 2007
ASML Netherlands B.V.
Vadim Yevgenyevich Banine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS AND CONTAMINATION DETECTION METHOD
Publication number
20110090495
Publication date
Apr 21, 2011
ASML NETHERLANDS B.V.
Anastasius Jacobus Anicetus Bruinsma
G01 - MEASURING TESTING
Information
Patent Application
Lithographic apparatus having a debris-mitigation system, a source...
Publication number
20050140945
Publication date
Jun 30, 2005
ASML NETHERLANDS B.V.
Vadim Yevgenyevich Banine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY