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Abraham Z. Meiri
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Haifa, IL
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last 30 patents
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Patent Grant
Partitioning method for E-beam lithography
Patent number
5,313,068
Issue date
May 17, 1994
International Business Machines Corporation
Abraham Z. Meiri
B82 - NANO-TECHNOLOGY
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Patent Grant
Proximity correction method for E-beam lithography
Patent number
5,241,185
Issue date
Aug 31, 1993
International Business Machines Corporation
Abraham Z. Meiri
B82 - NANO-TECHNOLOGY