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Patents Grants
last 30 patents
Information
Patent Grant
RuO0.8 electrode and structure
Patent number
7,924,547
Issue date
Apr 12, 2011
The United States of America as represented by the Secretary of the Navy
Steven R. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming an RuOx electrode and structure
Patent number
7,709,274
Issue date
May 4, 2010
The United States of America as represented by the Secretary of the Navy
Steven R. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrical coupling between chamber parts in electronic device proc...
Patent number
6,779,481
Issue date
Aug 24, 2004
Tokyo Electron Limited
Martin A. Kent
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Etchant for use in a semiconductor processing method and system
Patent number
6,465,359
Issue date
Oct 15, 2002
Tokyo Electron Ltd.
Masahiro Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor processing method and system using C.sub.5 F.sub.8
Patent number
6,159,862
Issue date
Dec 12, 2000
Tokyo Electron Ltd.
Masahiro Yamada
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ETCHANT FOR USE IN A SEMICONDUCTOR PROCESSING METHOD AND SYSTEM
Publication number
20020030174
Publication date
Mar 14, 2002
MASAHIRO YAMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrical coupling between chamber parts in electronic device proc...
Publication number
20010035132
Publication date
Nov 1, 2001
TOKYO ELECTRON LIMITED
Martin A. Kent
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...