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Adam Bateman
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Fremont, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Halogen removal module and associated systems and methods
Patent number
10,903,065
Issue date
Jan 26, 2021
Lam Research Corporation
Travis R. Taylor
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
AUTOCLEAN FOR LOAD LOCKS IN SUBSTRATE PROCESSING SYSTEMS
Publication number
20220375773
Publication date
Nov 24, 2022
LAM RESEARCH CORPORATION
Adam Patrick BATEMAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Halogen Removal Module and Associated Systems and Methods
Publication number
20180330942
Publication date
Nov 15, 2018
LAM RESEARCH CORPORATION
Travis R. Taylor
B08 - CLEANING
Information
Patent Application
IN SITU CLEAN USING HIGH VAPOR PRESSURE AEROSOLS
Publication number
20180311707
Publication date
Nov 1, 2018
LAM RESEARCH CORPORATION
Travis R. Taylor
B08 - CLEANING