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Adam Bertuch

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  • Boston, MA, US
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Patents Applicationslast 30 patents

  • Information Patent Application

    PE-ALD METHODS WITH REDUCED QUARTZ-BASED CONTAMINATION
    • Publication number 20170241019
    • Publication date Aug 24, 2017
    • Ultratech, Inc.
    • Mark J. Sowa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VAPOR DELIVERY SYSTEM
    • Publication number 20170145564
    • Publication date May 25, 2017
    • Ultratech, Inc.
    • Adam Bertuch
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR PRECURSOR DELIVERY
    • Publication number 20110311726
    • Publication date Dec 22, 2011
    • Cambridge NanoTech Inc.
    • Guo Liu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...