Adam Liron

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Pleasanton, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Tunable upper plasma-exclusion-zone ring for a bevel etcher
- Patent number 11,756,771
- Issue date Sep 12, 2023
- Lam Research Corporation
- Jack Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tunable upper plasma-exclusion-zone ring for a bevel etcher
- Patent number 10,937,634
- Issue date Mar 2, 2021
- Lam Research Corporation
- Jack Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TUNABLE UPPER PLASMA-EXCLUSION-ZONE RING FOR A BEVEL ETCHER
- Publication number 20210151297
- Publication date May 20, 2021
- LAM RESEARCH CORPORATION
- Jack CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE UPPER PLASMA-EXCLUSION-ZONE RING FOR A BEVEL ETCHER
- Publication number 20150099365
- Publication date Apr 9, 2015
- LAM RESEARCH CORPORATION
- Jack Chen
- H01 - BASIC ELECTRIC ELEMENTS