Adam Mace

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature controlled window of a plasma processing chamber component
- Patent number 8,970,114
- Issue date Mar 3, 2015
- Lam Research Corporation
- Matt Busche
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER
- Publication number 20240266151
- Publication date Aug 8, 2024
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER
- Publication number 20240162015
- Publication date May 16, 2024
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wear Compensating Confinement Ring
- Publication number 20230369028
- Publication date Nov 16, 2023
- LAM RESEARCH CORPORATION
- Adam Christopher Mace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING FOR LOCALIZED DELIVERY OF TUNING GAS
- Publication number 20230128551
- Publication date Apr 27, 2023
- LAM RESEARCH CORPORATION
- Yohan SEEPERSAD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC EDGE RING MOUNTING SYSTEM FOR SUBSTRATE PROCESSING
- Publication number 20230075462
- Publication date Mar 9, 2023
- LAM RESEARCH CORPORATION
- Alexander MATYUSHKIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL-PHASE COOLING IN SEMICONDUCTOR MANUFACTURING
- Publication number 20220005675
- Publication date Jan 6, 2022
- LAM RESEARCH CORPORATION
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ring Structures and Systems for Use in a Plasma Chamber
- Publication number 20200365378
- Publication date Nov 19, 2020
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROLLED WINDOW OF A PLASMA PROCESSING CHAMBER COMPONENT
- Publication number 20140217895
- Publication date Aug 7, 2014
- LAM RESEARCH CORPORATION
- Matt Busche
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Temperature controlled window of a plasma processing chamber component

Patents Applicationslast 30 patents

RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER

RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER

Wear Compensating Confinement Ring

EDGE RING FOR LOCALIZED DELIVERY OF TUNING GAS

ELECTROSTATIC EDGE RING MOUNTING SYSTEM FOR SUBSTRATE PROCESSING

DUAL-PHASE COOLING IN SEMICONDUCTOR MANUFACTURING

Ring Structures and Systems for Use in a Plasma Chamber

TEMPERATURE CONTROLLED WINDOW OF A PLASMA PROCESSING CHAMBER COMPONENT