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Adam Michal Urbanowicz
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Dresden, DE
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last 30 patents
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Patent Grant
Detection of particle contamination on wafers
Patent number
9,091,667
Issue date
Jul 28, 2015
GLOBALFOUNDRIES Inc.
Adam Michal Urbanowicz
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
DETECTION OF PARTICLE CONTAMINATION ON WAFERS
Publication number
20150115153
Publication date
Apr 30, 2015
GLOBALFOUNDRIES INC.
Adam Michal Urbanowicz
G01 - MEASURING TESTING