Adam Q. Miller

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Felton, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Single body injector and deposition chamber
- Patent number 6,521,048
- Issue date Feb 18, 2003
- ASML US, Inc.
- Adam Q. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single body injector and deposition chamber
- Patent number 6,200,389
- Issue date Mar 13, 2001
- Silicon Valley Group Thermal Systems LLC
- Adam Q. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single body injector and method for delivering gases to a surface
- Patent number 6,022,414
- Issue date Feb 8, 2000
- Semiconductor Equipment Group, LLC
- Adam Q. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Single body injector and deposition chamber
- Publication number 20010004881
- Publication date Jun 28, 2001
- Silicon Valley Group Thermal Systems LLC
- Adam Q. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...