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Adam Selsley
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Schenectady, NY, US
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last 30 patents
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Patent Grant
Hybrid in-situ dry cleaning of oxidized surface layers
Patent number
8,227,344
Issue date
Jul 24, 2012
Tokyo Electron Limited
Adam Selsley
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
HYBRID IN-SITU DRY CLEANING OF OXIDIZED SURFACE LAYERS
Publication number
20110212274
Publication date
Sep 1, 2011
TOKYO ELECTRON LIMITED
Adam Selsley
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...