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Adam Woolfe
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Cambridgeshire, GB
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last 30 patents
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Patent Grant
Method and system for calibrating the scan amplitude of an electron...
Patent number
6,941,006
Issue date
Sep 6, 2005
Dupont Photomasks, Inc.
Michael J. Penberth
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Electron beam lithography system having variable writing speed
Patent number
6,288,406
Issue date
Sep 11, 2001
Dupont Photomasks, Inc.
Michael J. Penberth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam blanking method and system for electron beam lithogra...
Patent number
6,278,124
Issue date
Aug 21, 2001
Dupont Photomasks, Inc.
Michael J. Penberth
B82 - NANO-TECHNOLOGY