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Adarsh BASAVALINGAPPA
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Albany, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method for selectively etching with reduced aspect ratio dependence
Patent number
10,541,141
Issue date
Jan 21, 2020
Lam Research Corporation
Adarsh Basavalingappa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for selectively etching with reduced aspect ratio dependence
Patent number
10,037,890
Issue date
Jul 31, 2018
Lam Research Corporation
Adarsh Basavalingappa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for selectively etching silicon oxide with respect to an org...
Patent number
10,002,773
Issue date
Jun 19, 2018
Lam Research Corporation
Bhaskar Nagabhirava
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD FOR SELECTIVELY ETCHING WITH REDUCED ASPECT RATIO DEPENDENCE
Publication number
20180330959
Publication date
Nov 15, 2018
LAM RESEARCH CORPORATION
Adarsh BASAVALINGAPPA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR SELECTIVELY ETCHING SILICON OXIDE WITH RESPECT TO AN ORG...
Publication number
20180102257
Publication date
Apr 12, 2018
LAM RESEARCH CORPORATION
Bhaskar NAGABHIRAVA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR SELECTIVELY ETCHING WITH REDUCED ASPECT RATIO DEPENDENCE
Publication number
20180102253
Publication date
Apr 12, 2018
LAM RESEARCH CORPORATION
Adarsh BASAVALINGAPPA
H01 - BASIC ELECTRIC ELEMENTS