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Adele MARIADASS
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Reno, NV, US
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last 30 patents
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Patent Grant
Plasma preclean system for cluster tool
Patent number
12,334,318
Issue date
Jun 17, 2025
Applied Materials, Inc.
Songjae Lee
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL
Publication number
20230402268
Publication date
Dec 14, 2023
Applied Materials, Inc.
Songjae LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...