Adelina K. Schikova

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Leuven, BE

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Patents Applicationslast 30 patents

Information Patent Application
USE OF F-BASED GATE ETCH TO PASSIVATE THE HIGH-K/METAL GATE STACK F...
- Publication number 20080164539
- Publication date Jul 10, 2008
- Interuniversitair Microelektronica Centrum (IMEC)
- Nadine Collaert
- H01 - BASIC ELECTRIC ELEMENTS