Adi Pahima

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Migdal Ha'emek, IL

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic substrate cleaning system and method
- Patent number 12,009,227
- Issue date Jun 11, 2024
- KLA Corporation
- Shai Mark
- B08 - CLEANING
Information Patent Grant
Active reticle carrier for in situ stage correction
- Patent number 11,774,866
- Issue date Oct 3, 2023
- KLA Corporation
- Avner Safrani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
In situ process chamber chuck cleaning by cleaning substrate
- Patent number 11,638,938
- Issue date May 2, 2023
- KLA Corporation
- Mor Azaria
- B08 - CLEANING
Information Patent Grant
Systems and methods for chuck cleaning
- Patent number 11,607,716
- Issue date Mar 21, 2023
- KLA Corporation
- Shai Mark
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
MINI ENVIRONMENT INSTRUMENTED WAFER
- Publication number 20250014950
- Publication date Jan 9, 2025
- KLA Corporation
- Giampietro Bieli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU PROCESS CHAMBER CHUCK CLEANING BY CLEANING SUBSTRATE
- Publication number 20230264234
- Publication date Aug 24, 2023
- KLA Corporation
- Mor Azaria
- B08 - CLEANING
Information Patent Application
ELECTROSTATIC SUBSTRATE CLEANING SYSTEM AND METHOD
- Publication number 20220359234
- Publication date Nov 10, 2022
- KLA Corporation
- Shai Mark
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTIVE RETICLE CARRIER FOR IN SITU STAGE CORRECTION
- Publication number 20220066333
- Publication date Mar 3, 2022
- KLA Corporation
- Avner Safrani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
In Situ Process Chamber Chuck Cleaning by Cleaning Substrate
- Publication number 20200384509
- Publication date Dec 10, 2020
- KLA Corporation
- Mor Azaria
- B08 - CLEANING