Adrian Bürli

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Zurich, CH

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Patents Grantslast 30 patents

Information Patent Grant
Method for maskless particle-beam exposure
- Patent number 8,222,621
- Issue date Jul 17, 2012
- IMS Nanofabrication AG
- Heinrich Fragner
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Constant current multi-beam patterning
- Patent number 8,057,972
- Issue date Nov 15, 2011
- IMS Nanofabrication AG
- Heinrich Fragner
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MASKLESS PARTICLE-BEAM EXPOSURE
- Publication number 20100127185
- Publication date May 27, 2010
- IMS Nanofabrication AG
- Heinrich Fragner
- B82 - NANO-TECHNOLOGY