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Adrian Kiermasz
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Union City, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Linear chemical mechanical planarization (CMP) system and method fo...
Patent number
7,086,936
Issue date
Aug 8, 2006
Lam Research Corporation
Adrian Kiermasz
B24 - GRINDING POLISHING
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Patent Grant
Platen with diaphragm and method for optimizing wafer polishing
Patent number
7,018,273
Issue date
Mar 28, 2006
Lam Research Corporation
Adrian Kiermasz
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad conditioning and polishing liquid dispersal system
Patent number
6,969,307
Issue date
Nov 29, 2005
Lam Research Corporation
Adrian Kiermasz
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
POLISHING PAD CONDITIONING AND POLISHING LIQUID DISPERSAL SYSTEM
Publication number
20050221730
Publication date
Oct 6, 2005
Lam Research Corporation
Adrian Kiermasz
B24 - GRINDING POLISHING