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Adrian Staicu
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Ulm, DE
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Patents Grants
last 30 patents
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Patent Grant
Field facet mirror for an illumination optics of a projection expos...
Patent number
9,304,406
Issue date
Apr 5, 2016
Carl Zeiss SMT GmbH
Adrian Staicu
G02 - OPTICS
Information
Patent Grant
Field facet mirror for an illumination optics of a projection expos...
Patent number
8,717,541
Issue date
May 6, 2014
Carl Zeiss SMT GmbH
Adrian Staicu
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
OPTICAL COMPONENT
Publication number
20160077442
Publication date
Mar 17, 2016
Carl Zeiss SMT GMBH
Adrian Staicu
G02 - OPTICS
Information
Patent Application
FIELD FACET MIRROR FOR AN ILLUMINATION OPTICS OF A PROJECTION EXPOS...
Publication number
20140218709
Publication date
Aug 7, 2014
Carl Zeiss SMT GmbH
Adrian Staicu
G02 - OPTICS
Information
Patent Application
FIELD FACET MIRROR FOR AN ILLUMINATION OPTICS OF A PROJECTION EXPOS...
Publication number
20110164233
Publication date
Jul 7, 2011
Carl Zeiss SMT GMBH
Adrian Staicu
G02 - OPTICS