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Adrianne Kay Tipton
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Sequential deposition/anneal film densification method
Patent number
7,790,633
Issue date
Sep 7, 2010
Novellus Systems, Inc.
Raihan M. Tarafdar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for modulation of precursor exposure during a...
Patent number
7,700,155
Issue date
Apr 20, 2010
Novellus Systems, Inc.
Francisco Juarez
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Conformal nanolaminate dielectric deposition and etch bag gap fill...
Patent number
7,482,247
Issue date
Jan 27, 2009
Novellus Systems, Inc.
George D. Papasouliotis
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for controlling properties of conformal silica nanolaminates...
Patent number
7,297,608
Issue date
Nov 20, 2007
Novellus Systems, Inc.
George D. Papasouliotis
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for the use of alkoxysilanol precursors for vapor depositio...
Patent number
7,294,583
Issue date
Nov 13, 2007
Novellus Systems, Inc.
Ron Rulkens
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for forming high density, conformal, silica nanolaminate fi...
Patent number
7,271,112
Issue date
Sep 18, 2007
Novellus Systems, Inc.
George D. Papasouliotis
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dynamic rapid vapor deposition process for conformal silica laminates
Patent number
7,223,707
Issue date
May 29, 2007
Novellus Systems, Inc.
George D. Papasouliotis
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of porogen removal from porous low-k films using UV radiation
Patent number
7,208,389
Issue date
Apr 24, 2007
Novellus Systems, Inc.
Adrianne K. Tipton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silica thin films produced by rapid surface catalyzed vapor deposit...
Patent number
7,202,185
Issue date
Apr 10, 2007
Novellus Systems, Inc.
Dennis M. Hausmann
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sequential deposition/anneal film densification method
Patent number
7,148,155
Issue date
Dec 12, 2006
Novellus Systems, Inc.
Raihan M. Tarafdar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aluminum phosphate incorporation in silica thin films produced by r...
Patent number
7,129,189
Issue date
Oct 31, 2006
Novellus Systems, Inc.
Dennis M. Hausmann
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Mixed alkoxy precursors and methods of their use for rapid vapor de...
Patent number
7,097,878
Issue date
Aug 29, 2006
Novellus Systems, Inc.
Ron Rulkens
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for using surfactants in supercritical fluid p...
Patent number
6,905,556
Issue date
Jun 14, 2005
Novellus Systems, Inc.
Raashina Humayun
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Properties of a silica thin film produced by a rapid vapor depositi...
Patent number
6,867,152
Issue date
Mar 15, 2005
Novellus Systems, Inc.
Dennis M. Hausmann
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for removing photoresist and post-etch residue...
Patent number
6,848,455
Issue date
Feb 1, 2005
Novellus Systems, Inc.
Krishnan Shrinivasan
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Method for removing photoresist and post-etch residue using activat...
Patent number
6,800,142
Issue date
Oct 5, 2004
Novellus Systems, Inc.
Adrianne Kay Tipton
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Supercritical solutions for cleaning photoresist and post-etch resi...
Patent number
6,764,552
Issue date
Jul 20, 2004
Novellus Systems, Inc.
Patrick C. Joyce
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Method and apparatus for radiation enhanced supercritical fluid pro...
Patent number
6,715,498
Issue date
Apr 6, 2004
Novellus Systems, Inc.
Raashina Humayun
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR MODULATION OF PRECURSOR EXPOSURE DURING A...
Publication number
20100173074
Publication date
Jul 8, 2010
NOVELLUS SYSTEMS INC.
Francisco Juarez
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...