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Adrianus F.P. Engelen
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and method
Patent number
10,222,703
Issue date
Mar 5, 2019
ASML Netherlands B.V.
Heine Melle Mulder
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of determining dose and focus, inspection apparatus, pattern...
Patent number
9,964,853
Issue date
May 8, 2018
ASML Netherlands B.V.
Peter Clement Paul Vanoppen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
9,778,575
Issue date
Oct 3, 2017
ASML Netherlands B.V.
Heine Melle Mulder
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of controlling a lithographic apparatus, device manufacturin...
Patent number
9,696,635
Issue date
Jul 4, 2017
ASML Netherlands B.V.
Adrianus Fransiscus Petrus Engelen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,285,685
Issue date
Mar 15, 2016
ASML NETHERLANDS B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
9,250,536
Issue date
Feb 2, 2016
ASML Netherlands B.V.
Heine Melle Mulder
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
8,937,706
Issue date
Jan 20, 2015
ASML Netherlands B.V.
Heine Melle Mulder
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,711,330
Issue date
Apr 29, 2014
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
6,809,797
Issue date
Oct 26, 2004
ASML Netherlands B.V.
Johannes Jacobus Matheus Baselmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20170315450
Publication date
Nov 2, 2017
ASML NETHERLANDS B.V.
Heine Melle MULDER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20160116848
Publication date
Apr 28, 2016
ASML NETHERLANDS B.V.
Heine Melle MULDER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of Determining Dose and Focus, Inspection Apparatus, Pattern...
Publication number
20150293458
Publication date
Oct 15, 2015
ASML NETHERLANDS B.V.
Peter Clement Paul Vanoppen
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20140293248
Publication date
Oct 2, 2014
ASML NETHERLANDS B.V.
Bob STREEFKERK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method and exchangeabl...
Publication number
20070177122
Publication date
Aug 2, 2007
ASML NETHERLANDS B.V.
Erik Roelof Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050174550
Publication date
Aug 11, 2005
ASML NETHERLANDS B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20020191165
Publication date
Dec 19, 2002
ASML NETHERLANDS B.V.
Johannes J.M. Baselmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY