Adrianus Hendrik Koevoets

Person

Mierlo, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithography apparatus
- Patent number 11,740,566
- Issue date Aug 29, 2023
- ASML Netherlands B.V.
- Paulus Albertus Van Hal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and an object positioning system
- Patent number RE49142
- Issue date Jul 19, 2022
- ASML Netherlands B.V.
- Adrianus Hendrik Koevoets
Information Patent Grant
Chucks and clamps for holding objects of a lithographic apparatus a...
- Patent number RE49066
- Issue date May 10, 2022
- ASML Holding N.V.
- Raymond Wilhelmus Louis Lafarre
Information Patent Grant
Cooling apparatus and plasma-cleaning station for cooling apparatus
- Patent number 11,287,752
- Issue date Mar 29, 2022
- ASML Netherlands B.V.
- Adrianus Hendrik Koevoets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cooling apparatus and plasma-cleaning station for cooling apparatus
- Patent number 11,231,657
- Issue date Jan 25, 2022
- ASML Netherlands B.V.
- Adrianus Hendrik Koevoets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multilayer reflector, method of manufacturing a multilayer reflecto...
- Patent number 10,955,595
- Issue date Mar 23, 2021
- ASML Netherlands B.V.
- Koos Van Berkel
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus
- Patent number 10,935,895
- Issue date Mar 2, 2021
- ASML Netherlands B.V.
- Adrianus Hendrik Koevoets
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support apparatus, lithographic apparatus and device manufacturing...
- Patent number 10,747,125
- Issue date Aug 18, 2020
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis Lafarre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 10,747,127
- Issue date Aug 18, 2020
- ASML Netherlands B.V.
- Frits Van Der Meulen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint lithography apparatus and method
- Patent number 10,712,678
- Issue date Jul 14, 2020
- ASML Netherlands B.V.
- Yvonne Wendela Kruijt-Stegeman
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithographic apparatus
- Patent number 10,416,574
- Issue date Sep 17, 2019
- ASML Netherlands B.V.
- Adrianus Hendrik Koevoets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 10,394,140
- Issue date Aug 27, 2019
- ASML Netherlands B.V.
- Hendrikus Herman Marie Cox
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Chucks and clamps for holding objects of a lithographic apparatus a...
- Patent number 10,324,383
- Issue date Jun 18, 2019
- ASML Holding N.V.
- Raymond Wilhelmus Louis Lafarre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support apparatus, lithographic apparatus and device manufacturing...
- Patent number 10,120,292
- Issue date Nov 6, 2018
- ASML Netherlands, B.V.
- Raymond Wilhelmus Louis Lafarre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method of manufacturing a lithographic a...
- Patent number 10,018,926
- Issue date Jul 10, 2018
- ASML Netherlands, B.V.
- Rogier Hendrikus Magdalena Cortie
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for compensating for an exposure error, a device manufacturi...
- Patent number 9,983,489
- Issue date May 29, 2018
- ASML Netherlands B.V.
- Christianus Wilhelmus Johannes Berendsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and an object positioning system
- Patent number 9,939,738
- Issue date Apr 10, 2018
- ASML Netherlands B.V.
- Adrianus Hendrik Koevoets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 9,696,640
- Issue date Jul 4, 2017
- ASML Netherlands B.V.
- Adrianus Hendrik Koevoets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus with a metrology system for measuring a posi...
- Patent number 9,684,249
- Issue date Jun 20, 2017
- ASML Netherlands B.V.
- Adrianus Hendrik Koevoets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,618,859
- Issue date Apr 11, 2017
- ASML Netherlands B.V.
- Adrianus Hendrik Koevoets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support apparatus, lithographic apparatus and device manufacturing...
- Patent number 9,507,275
- Issue date Nov 29, 2016
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis Lafarre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography method and apparatus
- Patent number 9,310,700
- Issue date Apr 12, 2016
- ASML Netherlands B.V.
- Adrianus Hendrik Koevoets
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Positioning system, lithographic apparatus and device manufacturing...
- Patent number 9,122,173
- Issue date Sep 1, 2015
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measurement system, lithographic apparatus and device manu...
- Patent number 8,922,756
- Issue date Dec 30, 2014
- ASML Netherlands B.V.
- Willem Herman Gertruda Anna Koenen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a method to compensate for the effect of...
- Patent number 8,300,208
- Issue date Oct 30, 2012
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning system, lithographic apparatus and device manufacturing...
- Patent number 8,144,310
- Issue date Mar 27, 2012
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE HOLDER AND METHOD
- Publication number 20240264540
- Publication date Aug 8, 2024
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van de Kerkhof
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A METHOD AND SYSTEM FOR PREDICTING ABERRATIONS IN A PROJECTION SYSTEM
- Publication number 20240077380
- Publication date Mar 7, 2024
- ASML NETHERLANDS B.V.
- Marinus Maria Johannes VAN DE WAL
- G01 - MEASURING TESTING
Information Patent Application
IMPROVED LITHOGRAPHY APPARATUS
- Publication number 20230068088
- Publication date Mar 2, 2023
- ASML NETHERLANDS B.V.
- Paulus Albertus VAN HAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLING APPARATUS AND PLASMA-CLEANING STATION FOR COOLING APPARATUS
- Publication number 20200233319
- Publication date Jul 23, 2020
- ASML NETHERLANDS B.V.
- Adrianus, Hendrik Koevoets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus
- Publication number 20190369508
- Publication date Dec 5, 2019
- ASML NETHERLANDS B.V.
- Adrianus Hendrik KOEVOETS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lithographic Apparatus
- Publication number 20190227445
- Publication date Jul 25, 2019
- ASML NETHERLANDS B.V.
- Frits VAN DER MEULEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus
- Publication number 20190187573
- Publication date Jun 20, 2019
- ASML NETHERLANDS B.V.
- Hendrikus Herman Marie COX
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...
- Publication number 20190072863
- Publication date Mar 7, 2019
- ASML NETHERLANDS B.V.
- Raymond Wilhelmus Louis Lafarre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHUCKS AND CLAMPS FOR HOLDING OBJECTS OF A LITHOGRAPHIC APPARATUS A...
- Publication number 20180321602
- Publication date Nov 8, 2018
- ASML Holding N.V.
- Raymond Wilhelmus Louis LAFARRE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lithographic Apparatus
- Publication number 20180173116
- Publication date Jun 21, 2018
- ASML NETHERLANDS B.V.
- Adrianus Hendrik KOEVOETS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING A LITHOGRAPHIC A...
- Publication number 20180067398
- Publication date Mar 8, 2018
- Rogier Hendrikus Magdalena CORTIE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A LITHOGRAPHIC APPARATUS AND AN OBJECT POSITIONING SYSTEM
- Publication number 20170212429
- Publication date Jul 27, 2017
- ASML NETHERLANDS B.V.
- Adrianus Hendrik KOEVOETS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method For Compensating for an Exposure Error, a Device Manufacturi...
- Publication number 20170115578
- Publication date Apr 27, 2017
- ASML NETHERLANDS B.V.
- Christianus Wilhelmus Johannes BERENDSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...
- Publication number 20170090304
- Publication date Mar 30, 2017
- ASML NETHERLANDS B.V.
- Raymond Wilhelmus Louis Lafarre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT LITHOGRAPHY APPARATUS AND METHOD
- Publication number 20160195823
- Publication date Jul 7, 2016
- ASML NETHERLANDS B.V.
- Yvonne Wendela KRUIJT-STEGEMAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...
- Publication number 20150109599
- Publication date Apr 23, 2015
- ASML NETHERLANDS B.V.
- Adrianus Hendrik Koevoets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20150098067
- Publication date Apr 9, 2015
- ASML NETHERLANDS B.V.
- Adrianus Hendrik Koevoets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus With A Metrology System For Measuring A Posi...
- Publication number 20140368800
- Publication date Dec 18, 2014
- ASML NETHERLANDS B.V.
- Adrianus Hendrik Koevoets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20140340659
- Publication date Nov 20, 2014
- ASML NETHERLANDS B.V.
- Jan Bernard Plechelmus Van Schoot
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithography Method and Apparatus
- Publication number 20130128246
- Publication date May 23, 2013
- ASML Neitherlands B.V.
- Adrìanus Hendrik Koevoets
- B82 - NANO-TECHNOLOGY
Information Patent Application
POSITION MEASUREMENT SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANU...
- Publication number 20130050670
- Publication date Feb 28, 2013
- ASML NETHERLANDS B.V.
- Willem Herman Gertruda Anna Koenen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Positioning System, Lithographic Apparatus and Device Manufacturing...
- Publication number 20120147355
- Publication date Jun 14, 2012
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection System, Lithographic Apparatus, Method of Projecting a B...
- Publication number 20110194088
- Publication date Aug 11, 2011
- AMSL NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imprint Lithography Apparatus and Method
- Publication number 20110001254
- Publication date Jan 6, 2011
- ASML NETHERLANDS B.V.
- Yvonne Wendela Kruijt-Stegeman
- B82 - NANO-TECHNOLOGY
Information Patent Application
Lithographic Apparatus and A Method to Compensate for the Effect of...
- Publication number 20100149516
- Publication date Jun 17, 2010
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positioning System, Lithographic Apparatus and Device Manufacturing...
- Publication number 20090262325
- Publication date Oct 22, 2009
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Adrianus Hendrik Koevoets

Person

Patents Grantslast 30 patents

Lithography apparatus

Lithographic apparatus and an object positioning system

Chucks and clamps for holding objects of a lithographic apparatus a...

Cooling apparatus and plasma-cleaning station for cooling apparatus

Cooling apparatus and plasma-cleaning station for cooling apparatus

Multilayer reflector, method of manufacturing a multilayer reflecto...

Lithographic apparatus

Support apparatus, lithographic apparatus and device manufacturing...

Lithographic apparatus

Imprint lithography apparatus and method

Lithographic apparatus

Lithographic apparatus

Chucks and clamps for holding objects of a lithographic apparatus a...

Support apparatus, lithographic apparatus and device manufacturing...

Lithographic apparatus and method of manufacturing a lithographic a...

Method for compensating for an exposure error, a device manufacturi...

Lithographic apparatus and an object positioning system

Lithographic apparatus

Lithographic apparatus with a metrology system for measuring a posi...

Lithographic apparatus and device manufacturing method

Support apparatus, lithographic apparatus and device manufacturing...

Lithography method and apparatus

Positioning system, lithographic apparatus and device manufacturing...

Position measurement system, lithographic apparatus and device manu...

Lithographic apparatus and a method to compensate for the effect of...

Positioning system, lithographic apparatus and device manufacturing...

Patents Applicationslast 30 patents

SUBSTRATE HOLDER AND METHOD

A METHOD AND SYSTEM FOR PREDICTING ABERRATIONS IN A PROJECTION SYSTEM

IMPROVED LITHOGRAPHY APPARATUS

COOLING APPARATUS AND PLASMA-CLEANING STATION FOR COOLING APPARATUS

Lithographic Apparatus

Lithographic Apparatus

Lithographic Apparatus

SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...

CHUCKS AND CLAMPS FOR HOLDING OBJECTS OF A LITHOGRAPHIC APPARATUS A...

Lithographic Apparatus

LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING A LITHOGRAPHIC A...

A LITHOGRAPHIC APPARATUS AND AN OBJECT POSITIONING SYSTEM

Method For Compensating for an Exposure Error, a Device Manufacturi...

SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...

IMPRINT LITHOGRAPHY APPARATUS AND METHOD

SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...

LITHOGRAPHIC APPARATUS

Lithographic Apparatus With A Metrology System For Measuring A Posi...

Lithographic Apparatus and Device Manufacturing Method

Lithography Method and Apparatus

POSITION MEASUREMENT SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANU...

Positioning System, Lithographic Apparatus and Device Manufacturing...

Projection System, Lithographic Apparatus, Method of Projecting a B...

Imprint Lithography Apparatus and Method

Lithographic Apparatus and A Method to Compensate for the Effect of...

Positioning System, Lithographic Apparatus and Device Manufacturing...