Afshin Nickhou

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Campbell, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for drying semiconductor wafer surfaces using...
- Patent number 7,234,477
- Issue date Jun 26, 2007
- Lam Research Corporation
- John M. de Larios
- B08 - CLEANING
Information Patent Grant
Megasonic substrate processing module
- Patent number 6,866,051
- Issue date Mar 15, 2005
- Lam Research Corporation
- Afshin Nickhou
- B08 - CLEANING
Information Patent Grant
Substrate processing using a fluid re-circulation system in a wafer...
- Patent number 6,851,436
- Issue date Feb 8, 2005
- Lam Research Corporation
- Michael Ravkin
- B08 - CLEANING