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Winksele-Herent, BE
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last 30 patents
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Patent Grant
Method for producing micromachined devices and devices obtained the...
Patent number
6,740,542
Issue date
May 25, 2004
Interuniversitair Microelektronica Centrum
Ann Witvrouw
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
Method for producing micromachined devices and devices obtained the...
Publication number
20020108926
Publication date
Aug 15, 2002
Ann Witvrouw
B81 - MICRO-STRUCTURAL TECHNOLOGY