Agus Tjandra

Person

People

Patents Grantslast 30 patents

Information Patent Grant
Chamber inlet
- Patent number D1023987
- Issue date Apr 23, 2024
- Applied Materials, Inc.
- Eric Kihara Shono
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Method and apparatus for supplying improved gas flow to a processin...
- Patent number 11,732,355
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for supplying improved gas flow to a processin...
- Patent number 11,697,875
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Remote plasma oxidation chamber
- Patent number 11,615,944
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Christopher S. Olsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Side inject designs for improved radical concentrations
- Patent number 11,501,945
- Issue date Nov 15, 2022
- Applied Materials, Inc.
- Eric Kihara Shono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dogbone inlet cone profile for remote plasma oxidation chamber
- Patent number 11,501,954
- Issue date Nov 15, 2022
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injection apparatus with heating channels
- Patent number 11,268,193
- Issue date Mar 8, 2022
- Applied Materials, Inc.
- Lara Hawrylchak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Side inject nozzle design for processing chamber
- Patent number 11,091,835
- Issue date Aug 17, 2021
- Applied Materials, Inc.
- Agus Sofian Tjandra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber inlet
- Patent number D924825
- Issue date Jul 13, 2021
- Applied Materials, Inc.
- Eric Kihara Shono
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Dogbone inlet cone profile for remote plasma oxidation chamber
- Patent number 11,049,696
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Side inject designs for improved radical concentrations
- Patent number 10,847,337
- Issue date Nov 24, 2020
- Applied Materials, Inc.
- Eric Kihara Shono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for selective oxidation at lower temperature u...
- Patent number 10,714,333
- Issue date Jul 14, 2020
- Applied Materials, Inc.
- Heng Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injection apparatus with heating channels
- Patent number 10,689,757
- Issue date Jun 23, 2020
- Applied Materials, Inc.
- Lara Hawrylchak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dogbone inlet cone profile for remote plasma oxidation chamber
- Patent number 10,636,626
- Issue date Apr 28, 2020
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon germanium selective oxidation process
- Patent number 10,600,641
- Issue date Mar 24, 2020
- Applied Materials, Inc.
- Agus Sofian Tjandra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Side inject nozzle design for processing chamber
- Patent number 10,260,149
- Issue date Apr 16, 2019
- Applied Materials, Inc.
- Agus Sofian Tjandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon germanium selective oxidation process
- Patent number 10,020,186
- Issue date Jul 10, 2018
- Applied Materials, Inc.
- Agus Sofian Tjandra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
H2/O2 side inject to improve process uniformity for low temperature...
- Patent number 9,869,017
- Issue date Jan 16, 2018
- Applied Materials, Inc.
- Agus Sofian Tjandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for selective oxidation of a substrate
- Patent number 9,514,968
- Issue date Dec 6, 2016
- Applied Materials, Inc.
- Agus Tjandra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injection apparatus and substrate process chamber incorporating...
- Patent number 9,123,758
- Issue date Sep 1, 2015
- Applied Materials, Inc.
- Agus Sofian Tjandra
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods and apparatus for selective oxidation of a substrate
- Patent number 8,993,458
- Issue date Mar 31, 2015
- Applied Materials, Inc.
- Agus Tjandra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal reactor with improved gas flow distribution
- Patent number 8,888,916
- Issue date Nov 18, 2014
- Applied Materials, Inc.
- Ming-Kuei (Michael) Tseng
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Thermal reactor with improved gas flow distribution
- Patent number 8,608,853
- Issue date Dec 17, 2013
- Applied Materials, Inc.
- Ming-Kuei (Michael) Tseng
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Methods of forming oxide layers on substrates
- Patent number 8,492,292
- Issue date Jul 23, 2013
- Applied Materials, Inc.
- Yoshitaka Yokota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming conformal oxide layers on semiconductor devices
- Patent number 8,435,906
- Issue date May 7, 2013
- Applied Materials, Inc.
- Agus S. Tjandra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal reactor with improved gas flow distribution
- Patent number 8,056,500
- Issue date Nov 15, 2011
- Applied Materials, Inc.
- Ming-Kuei (Michael) Tseng
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Lamp array for thermal processing exhibiting improved radial unifor...
- Patent number 7,509,035
- Issue date Mar 24, 2009
- Applied Materials, Inc.
- Joseph M. Ranish
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR SUPPLYING IMPROVED GAS FLOW TO A PROCESSIN...
- Publication number 20230407471
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
ENGINEERED DIELECTRIC PROFILE FOR HIGH ASPECT-RATIO 3D NAND STRUCTURES
- Publication number 20230282578
- Publication date Sep 7, 2023
- Intel NDTM US LLC
- Vijay Saradhi MANGU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAP-FILL FOR 3D NAND STAIRCASE
- Publication number 20220375870
- Publication date Nov 24, 2022
- Jung Chan Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOGBONE INLET CONE PROFILE FOR REMOTE PLASMA OXIDATION CHAMBER
- Publication number 20210272776
- Publication date Sep 2, 2021
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIDE INJECT DESIGNS FOR IMPROVED RADICAL CONCENTRATIONS
- Publication number 20210074505
- Publication date Mar 11, 2021
- Applied Materials, Inc.
- Eric Kihara SHONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS INJECTION APPARATUS WITH HEATING CHANNELS
- Publication number 20210040612
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOGBONE INLET CONE PROFILE FOR REMOTE PLASMA OXIDATION CHAMBER
- Publication number 20200219703
- Publication date Jul 9, 2020
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR SUPPLYING IMPROVED GAS FLOW TO A PROCESSIN...
- Publication number 20200199748
- Publication date Jun 25, 2020
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPROVED SIDE INJECT NOZZLE DESIGN FOR PROCESSING CHAMBER
- Publication number 20200040453
- Publication date Feb 6, 2020
- Applied Materials, Inc.
- Agus Sofian TJANDRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PROVIDING RADICAL SPECIES TO A PROCESSING...
- Publication number 20190295822
- Publication date Sep 26, 2019
- Applied Materials, Inc.
- Christopher S. OLSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIDE INJECT DESIGNS FOR IMPROVED RADICAL CONCENTRATIONS
- Publication number 20190228942
- Publication date Jul 25, 2019
- Applied Materials, Inc.
- Eric Kihara SHONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOGBONE INLET CONE PROFILE FOR REMOTE PLASMA OXIDATION CHAMBER
- Publication number 20190228951
- Publication date Jul 25, 2019
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON GERMANIUM SELECTIVE OXIDATION PROCESS
- Publication number 20190006175
- Publication date Jan 3, 2019
- Applied Materials, Inc.
- Agus Sofian TJANDRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE PLASMA OXIDATION CHAMBER
- Publication number 20180347045
- Publication date Dec 6, 2018
- Applied Materials, Inc.
- Christopher S. OLSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS INJECTION APPARATUS WITH HEATING CHANNELS
- Publication number 20180187305
- Publication date Jul 5, 2018
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON GERMANIUM SELECTIVE OXIDATION PROCESS
- Publication number 20180033615
- Publication date Feb 1, 2018
- Applied Materials, Inc.
- Agus Sofian TJANDRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIDE INJECT NOZZLE DESIGN FOR PROCESSING CHAMBER
- Publication number 20170314126
- Publication date Nov 2, 2017
- Applied Materials, Inc.
- Agus Sofian TJANDRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR SELECTIVE OXIDATION AT LOWER TEMPERATURE U...
- Publication number 20160300712
- Publication date Oct 13, 2016
- Applied Materials, Inc.
- Heng PAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
H2/O2 SIDE INJECT TO IMPROVE PROCESS UNIFORMITY FOR LOW TEMPERATURE...
- Publication number 20160010206
- Publication date Jan 14, 2016
- Applied Materials, Inc.
- Agus Sofian TJANDRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR SELECTIVE OXIDATION OF A SUBSTRATE
- Publication number 20150206777
- Publication date Jul 23, 2015
- Applied Materials, Inc.
- AGUS TJANDRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR SELECTIVE OXIDATION OF A SUBSTRATE
- Publication number 20140349491
- Publication date Nov 27, 2014
- Applied Materials, Inc.
- AGUS SOFIAN TJANDRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS INJECTION APPARATUS AND SUBSTRATE PROCESS CHAMBER INCORPORATING...
- Publication number 20140216585
- Publication date Aug 7, 2014
- Applied Materials, Inc.
- AGUS SOFIAN TJANDRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION
- Publication number 20140079376
- Publication date Mar 20, 2014
- Applied Materials, Inc.
- Ming-Kuei (Michael) TSENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR SELECTIVE OXIDATION AT LOWER TEMPERATURE U...
- Publication number 20140034632
- Publication date Feb 6, 2014
- Heng PAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR SELECTIVE OXIDATION OF A SUBSTRATE
- Publication number 20130210240
- Publication date Aug 15, 2013
- Applied Materials, Inc.
- AGUS TJANDRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION
- Publication number 20120058648
- Publication date Mar 8, 2012
- Ming-Kuei (Michael) Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF FORMING OXIDE LAYERS ON SUBSTRATES
- Publication number 20100330814
- Publication date Dec 30, 2010
- Applied Materials, Inc.
- Yoshitaka Yokota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for Forming Conformal Oxide Layers on Semiconductor Devices
- Publication number 20100216317
- Publication date Aug 26, 2010
- Applied Materials, Inc.
- Agus S. Tjandra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA AND THERMAL ANNEAL TREATMENT TO IMPROVE OXIDATION RESISTANCE...
- Publication number 20100120245
- Publication date May 13, 2010
- Agus Sofian Tjandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION
- Publication number 20090163042
- Publication date Jun 25, 2009
- Applied Materials, Inc.
- Ming-Kuei (Michael) Tseng
- H01 - BASIC ELECTRIC ELEMENTS

Agus Tjandra

Person

Patents Grantslast 30 patents

Chamber inlet

Method and apparatus for supplying improved gas flow to a processin...

Method and apparatus for supplying improved gas flow to a processin...

Remote plasma oxidation chamber

Side inject designs for improved radical concentrations

Dogbone inlet cone profile for remote plasma oxidation chamber

Gas injection apparatus with heating channels

Side inject nozzle design for processing chamber

Chamber inlet

Dogbone inlet cone profile for remote plasma oxidation chamber

Side inject designs for improved radical concentrations

Apparatus and method for selective oxidation at lower temperature u...

Gas injection apparatus with heating channels

Dogbone inlet cone profile for remote plasma oxidation chamber

Silicon germanium selective oxidation process

Side inject nozzle design for processing chamber

Silicon germanium selective oxidation process

H2/O2 side inject to improve process uniformity for low temperature...

Methods and apparatus for selective oxidation of a substrate

Gas injection apparatus and substrate process chamber incorporating...

Methods and apparatus for selective oxidation of a substrate

Thermal reactor with improved gas flow distribution

Thermal reactor with improved gas flow distribution

Methods of forming oxide layers on substrates

Methods for forming conformal oxide layers on semiconductor devices

Thermal reactor with improved gas flow distribution

Lamp array for thermal processing exhibiting improved radial unifor...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR SUPPLYING IMPROVED GAS FLOW TO A PROCESSIN...

ENGINEERED DIELECTRIC PROFILE FOR HIGH ASPECT-RATIO 3D NAND STRUCTURES

GAP-FILL FOR 3D NAND STAIRCASE

DOGBONE INLET CONE PROFILE FOR REMOTE PLASMA OXIDATION CHAMBER

SIDE INJECT DESIGNS FOR IMPROVED RADICAL CONCENTRATIONS

GAS INJECTION APPARATUS WITH HEATING CHANNELS

DOGBONE INLET CONE PROFILE FOR REMOTE PLASMA OXIDATION CHAMBER

METHOD AND APPARATUS FOR SUPPLYING IMPROVED GAS FLOW TO A PROCESSIN...

IMPROVED SIDE INJECT NOZZLE DESIGN FOR PROCESSING CHAMBER

METHOD AND APPARATUS FOR PROVIDING RADICAL SPECIES TO A PROCESSING...

SIDE INJECT DESIGNS FOR IMPROVED RADICAL CONCENTRATIONS

DOGBONE INLET CONE PROFILE FOR REMOTE PLASMA OXIDATION CHAMBER

SILICON GERMANIUM SELECTIVE OXIDATION PROCESS

REMOTE PLASMA OXIDATION CHAMBER

GAS INJECTION APPARATUS WITH HEATING CHANNELS

SILICON GERMANIUM SELECTIVE OXIDATION PROCESS

SIDE INJECT NOZZLE DESIGN FOR PROCESSING CHAMBER

APPARATUS AND METHOD FOR SELECTIVE OXIDATION AT LOWER TEMPERATURE U...

H2/O2 SIDE INJECT TO IMPROVE PROCESS UNIFORMITY FOR LOW TEMPERATURE...

METHODS AND APPARATUS FOR SELECTIVE OXIDATION OF A SUBSTRATE

METHODS AND APPARATUS FOR SELECTIVE OXIDATION OF A SUBSTRATE

GAS INJECTION APPARATUS AND SUBSTRATE PROCESS CHAMBER INCORPORATING...

THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION

APPARATUS AND METHOD FOR SELECTIVE OXIDATION AT LOWER TEMPERATURE U...

METHODS AND APPARATUS FOR SELECTIVE OXIDATION OF A SUBSTRATE

THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION

METHODS OF FORMING OXIDE LAYERS ON SUBSTRATES

Methods for Forming Conformal Oxide Layers on Semiconductor Devices

PLASMA AND THERMAL ANNEAL TREATMENT TO IMPROVE OXIDATION RESISTANCE...

THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION