Ahila Krishnamoorthy

Follow

Person

Singapore, SG

People

Patents Grantslast 30 patents

Information Patent Grant
Method to form Cu/OSG dual damascene structure for high performance...
- Patent number 6,913,994
- Issue date Jul 5, 2005
- Agency for Science, Technology and Research
- Qiang Guo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method to form Cu/OSG dual damascene structure for high performance...
- Publication number 20040203223
- Publication date Oct 14, 2004
- Institute of Microelectronics
- Qiang Guo
- H01 - BASIC ELECTRIC ELEMENTS