Aibing LI

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Beijing, CN

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Patents Applicationslast 30 patents

Information Patent Application
WAFER CLEANING EQUIPMENT, WAFER CHUCK, AND WAFER CLEANING METHOD
- Publication number 20240339353
- Publication date Oct 10, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Hongyu ZHAO
- B08 - CLEANING
Information Patent Application
CHUCK STRUCTURE OF SEMICONDUCTOR CLEANING APPARATUS AND SEMICONDUCT...
- Publication number 20230098212
- Publication date Mar 30, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Lu XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING CHAMBER AND CLEANING APPARATUS
- Publication number 20220250122
- Publication date Aug 11, 2022
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Hongjiao ZHANG
- B08 - CLEANING