AiHua Chen

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for processing semiconductor work pieces
- Patent number 9,947,562
- Issue date Apr 17, 2018
- Applied Materials, Inc.
- AiHua Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing system; a semiconductor processing chamber...
- Patent number 8,715,418
- Issue date May 6, 2014
- Advanced Micro-Fabrication Equipment, Inc. Asia
- AiHua Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-station plasma reactor with multiple plasma regions
- Patent number 8,336,488
- Issue date Dec 25, 2012
- Advanced Micro-Fabrication Equipment, Inc. Asia
- Aihua Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution assembly for use in a semiconductor work piece pro...
- Patent number 7,658,800
- Issue date Feb 9, 2010
- Advanced Micro-Fabrication Equipment, Inc. Asia
- AiHua Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
EPITAXIAL WAFER SUSCEPTOR AND SUPPORTIVE AND ROTATIONAL CONNECTION...
- Publication number 20130061805
- Publication date Mar 14, 2013
- JiangSu Zhongsheng Semiconductor Equipment Co., Ltd.
- Xiaoliang Jin
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING SEMICONDUCTOR WORK PIECES
- Publication number 20110305544
- Publication date Dec 15, 2011
- AiHua Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STATION PLASMA REACTOR WITH MULTIPLE PLASMA REGIONS
- Publication number 20090139453
- Publication date Jun 4, 2009
- AIHUA CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas distribution assembly for use in a semiconductor work piece pro...
- Publication number 20080092815
- Publication date Apr 24, 2008
- Advanced Micro-Fabrication Equipment, Inc. Asia
- AiHua Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for processing semiconductor work pieces
- Publication number 20070032097
- Publication date Feb 8, 2007
- Advanced Micro-Fabrication Equipment, Inc. Asia
- AiHua Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing system; a semiconductor processing chamber...
- Publication number 20070031236
- Publication date Feb 8, 2007
- Advanced Micro-Fabrication Equipment, Inc. Asia
- AiHua Chen
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Method and apparatus for processing semiconductor work pieces

Semiconductor processing system; a semiconductor processing chamber...

Multi-station plasma reactor with multiple plasma regions

Gas distribution assembly for use in a semiconductor work piece pro...

Patents Applicationslast 30 patents

EPITAXIAL WAFER SUSCEPTOR AND SUPPORTIVE AND ROTATIONAL CONNECTION...

METHOD AND APPARATUS FOR PROCESSING SEMICONDUCTOR WORK PIECES

MULTI-STATION PLASMA REACTOR WITH MULTIPLE PLASMA REGIONS

Gas distribution assembly for use in a semiconductor work piece pro...

Method and apparatus for processing semiconductor work pieces

Semiconductor processing system; a semiconductor processing chamber...